Related by context. Frequent words. (Click for all words.) 68 immersion lithography 65 #/#nm 65 #nm CMOS [001] 63 #nm node [001] 63 EUV lithography 63 EUVL 63 nm CMOS 62 #.# micron CMOS 61 CMOS logic 61 optical lithography 61 Gallium Nitride 61 BiCMOS 61 CMOS processes 60 #nm [001] 60 #.#μm [002] 60 HKMG 60 photoresists 59 smaller geometries 59 GaN HEMT 59 DUV 59 mm wafer 59 KrF 59 submicron 58 CMOS compatible 58 mm wafers 58 #mm wafer 58 photolithography 58 extendibility 58 micro machining 58 copper interconnects 58 Flip Chip 58 epitaxy 57 extreme ultraviolet EUV 57 DDR3 DRAM 57 nanoimprint lithography 57 FEOL 57 nanometer 57 micro optics 57 layer deposition ALD 57 nm 56 High Voltage CMOS 56 LTPS 56 nanoelectronic 56 optical coatings 56 VCSELs 56 #.#um [002] 56 photomasks 56 lithography 56 SiP 56 UV LED 56 WLCSP 56 InGaN 56 wafer bonding 56 XDR DRAM 56 EUV 56 LDMOS 56 Epson Toyocom 56 active matrix OLED 56 embedded NVM 55 #nm [002] 55 AlN 55 CMOS 55 microfabrication 55 nanolithography 55 MLC NAND flash 55 #mm wafer fab 55 TFTs 55 engineered substrates 55 Virtex 5 55 wafer probing 55 VCSEL 55 Active Matrix 54 SuperFlash 54 metallization 54 NOR Flash memory 54 deep submicron 54 eDRAM 54 silicon 54 XDR memory 54 SOI wafers 54 Lithography 54 dielectrics 54 film transistor TFT 54 through silicon vias 54 FB DIMM 54 Silicon Carbide 54 chip SoCs 54 photovoltaic module 54 conductive polymer 54 GaN 54 UV LEDs 54 PCB layout 54 UV curable 54 glass substrate 54 Atomic Layer Deposition 54 silicon germanium 54 photomask 54 photonic devices 54 #mm wafers 54 nanometer nm 54 nm node