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(Click for frequent words.) 77 EUVL 76 EUV lithography 74 extreme ultraviolet EUV 68 lithography 66 immersion lithography 64 extreme ultraviolet lithography 62 #nm node [001] 61 nm lithography 61 photomask 60 CIGS 60 optical lithography 60 computational lithography 60 nm node 59 ArF 59 nm immersion 59 nanoimprint 59 photolithography 58 EUV resists 58 argon fluoride 58 #nm immersion 58 maskless lithography 58 EUV mask 57 imprint lithography 57 Gigaphoton 57 EUV resist 57 photomasks 57 SEMATECH 57 mask optimization SMO 57 Lithography 56 TFPV 56 nano imprint 56 GaN 56 ArF immersion 56 ArF immersion lithography 56 Extreme Ultraviolet EUV 55 3D TSV 55 e beam lithography 55 ion beam 55 nanometer 55 mm wafer 55 #nm lithography [001] 55 EUV masks 55 #/#nm 55 deep ultraviolet DUV 55 silicon photovoltaics 55 SOI CMOS 55 nano imprint lithography 55 Energetiq 55 photoresist 55 nanolithography 55 extreme ultra violet 55 DUV 55 maskless 55 #nm immersion lithography 55 NuFlare 54 #nm [001] 54 #mm wafer 54 XT #i 54 epitaxy 54 nm CMOS 54 InGaAs 54 QCLs 54 #nm CMOS [001] 54 laser diode 54 #nm nodes 54 ASML 53 #nm #nm [005] 53 gallium nitride 53 silicon 53 MOCVD 53 reticle inspection 53 Sematech 53 VUV 53 nanometer node 53 reticles 53 #mm wafers 53 TCZ 53 TSVs 53 SUSS 53 Cymer 52 #.#μm [002] 52 CMOS 52 nm 52 wafer 52 manufacturable 52 Molecular Imprints 52 metrology 52 CIGS solar cells 52 CIGS cells 52 UV LED 52 wafer bonding 52 HEMT 52 #.# micron node 52 numerical aperture 52 PECVD 52 beamline 52 metallization 52 numerical aperture NA 52 photoresists 52 #nm RF CMOS 52 #nm DRAM 52 UV NIL 52 EUV Lithography 52 #nm [002] 52 nm nodes 52 electron beam 52 carbon nanotube CNT 52 microlithography 52 scatterometry 52 CIGSe 52 amorphous silicon 51 nitride 51 high-k/metal gate 51 amorphous silicon Si 51 SUSS MicroTec 51 InP 51 #nm silicon 51 poly silicon 51 Aerosol Jet 51 wafer thinning 51 Gallium Nitride 51 EBDW 51 RRAM 51 multijunction solar cells 51 microbolometer 51 lithographic 51 epitaxial 51 laser scribing 51 overlay metrology 51 deep sub micron 51 CdTe PV 51 Photolithography 51 IMEC 51 FinFET 51 nanoimprint lithography 51 .# micron 51 c Si 51 glass substrate 51 mm wafers 51 Angstron 51 laser diodes 51 x ray pulses 51 mask aligners 51 terahertz 51 silicon photonics 51 SiC 51 argon fluoride ArF 51 THz 51 dielectric etch 51 XLR #i 51 CMOS fabrication 51 ultraviolet laser 51 quantum dot 51 SiON 51 helium ion 51 millimeter wafer 51 Crolles2 51 diffraction 51 brightness LED 50 VCSEL 50 photolithographic 50 focused ion beam 50 MALDI 50 ion implantation 50 3Xnm 50 silicon wafer 50 backside illumination 50 photomask inspection 50 micro optics 50 fiber lasers 50 gallium nitride GaN 50 semiconductor lithography 50 CMOS MEMS 50 HBLED 50 VCSELs 50 BrightLase 50 #nm SOI 50 wafer bonder 50 Aera2 50 SiP 50 Extreme Ultra Violet 50 DFEB 50 nano patterning 50 lithography simulation 50 Double Patterning 50 Beamline #.#.# 50 OLED displays 50 OLED 50 fabs 50 produced plasma LPP 50 tunable laser 50 MEMS 50 ARPES 50 deep submicron CMOS 50 Obducat 50 photodetectors 50 electron beam lithography 50 JWST 50 JEOL 50 immersion litho 50 wafer thickness 50 crystalline silicon 49 #mm fab 49 UMC #nm 49 holographic storage 49 #.# micron CMOS 49 smaller geometries 49 antireflective coatings 49 CMOS oscillators 49 SiGen 49 pulsed laser 49 Terahertz 49 cadmium telluride 49 quantum dot lasers 49 Semprius 49 quantum cascade lasers 49 vapor deposition 49 GaN HEMT 49 TSMC 49 Aviza Technology 49 sSOI 49 photoluminescence 49 microbolometers 49 spectroscopic 49 Nanochip 49 Vertical Cavity Surface Emitting 49 planar 49 BiCMOS 49 photoresist strip 49 AFMs 49 interferometry 49 DPSS lasers 49 OLED lighting 49 shorter wavelengths 49 femtosecond 49 #nm/#nm 49 deep submicron 49 dielectrics 49 InGaN 49 ZnSe 49 wafers 49 silicon wafers 49 HKMG 49 k dielectrics 49 GaN LEDs 49 ownership CoO 49 MiaSole 49 nanopatterning 49 AlN 49 Indium Phosphide 49 Manz Automation 49 microchannel plate 48 electrodeposition 48 nm immersion lithography 48 pellicle 48 organic photovoltaics 48 CIGS PV 48 photovoltaic module 48 #nm wavelength [001] 48 Nova NanoSEM 48 DEK Solar 48 poly Si 48 GaN substrates 48 Auria Solar 48 CdSe 48 XFEL 48 silicon CMOS 48 GaAs 48 wafer fabs 48 submicron 48 absorption spectroscopy 48 reticle 48 monolithic microwave integrated 48 wafering 48 semiconductor 48 spectroscopy 48 TSMC #nm [001] 48 nitride semiconductor 48 Plasmonic 48 optical spectroscopy 48 pulsed laser deposition 48 k gate dielectric 48 selective emitter 48 femtosecond pulse 48 SiGe 48 2G HTS wire 48 Silicon Carbide 48 FinFETs 48 nanoelectronic 48 microfabrication 48 porous silicon 48 #mm fabs 48 Photomask 48 crystalline Si 48 SOI wafers 48 quantum cascade laser 48 GaN LED 48 TSMC #nm process 48 nanometer silicon 48 SOFC 48 plasma etch 48 #.#um [001] 48 blue laser diode 48 XsunX 48 defect densities 48 mm fabs 48 micro machining 48 FDSOI 48 bipolar transistors 48 flexible monolithically integrated 48 photodetector 48 solar concentrator 48 photovoltaics PV 48 National Synchrotron Light 48 electron optics 48 inkjet printhead 48 solar cells 48 epitaxial deposition 48 PHEMT 48 synchrotron X ray 48 DPSS laser 48 #nm photomask 48 CMP consumables 48 nanocrystal 48 CPV 48 di selenide CIGS 48 UV LEDs 47 Fraunhofer ISE 47 Airborne Particle Sensor 47 crystalline silicon c 47 low k dielectrics 47 CMOS wafer 47 Novellus 47 ASML TWINSCAN 47 optical metrology 47 monochromator 47 III nitride 47 defectivity 47 BEOL 47 C4NP 47 silicon germanium 47 CdTe 47 photonic devices 47 gravitational wave 47 millisecond anneal 47 silicon etch 47 ellipsometry 47 picosecond 47 QCL 47 pHEMT 47 silicon carbide 47 ISMI 47 2Xnm 47 edge roughness LER 47 xenon lamp 47 ANTARES 47 terahertz waves 47 brightfield 47 packaging WLP 47 LCOS 47 Aixtron MOCVD 47 ITRS roadmap 47 silane gas 47 Photovoltaic PV 47 voltage CMOS 47 magnetron sputtering 47 FTIR spectroscopy 47 DiCon 47 SiC substrates 47 KrF 47 photon detection 47 inkjet printing 47 laser micromachining 47 X ray microscopy 47 HCPV 47 Raman spectroscopy 47 LSA#A 47 CRIUS 47 MOS transistors 47 linearly polarized 47 Rapid prototyping 47 CMOS compatible 47 Solibro 47 Veeco 47 indium gallium nitride InGaN 47 BCDMOS 47 CMOS sensors 47 CIGS solar 47 FEOL 47 Grätzel cells 47 UV lasers 47 geometries shrink 47 k dielectric 47 AlN substrates 47 germanium substrates 47 copper interconnects 47 THz radiation 47 optical waveguides 47 wafer fabrication 47 Immersion Lithography 47 micromorph 47 Silicon Photonics 47 #nm node [002] 47 DFB lasers 47 #mm silicon wafers 47 wirebond 47 indium gallium arsenide InGaAs 47 Gallium Arsenide GaAs 47 HB LED 47 Carl Zeiss SMT 47 IEDM 47 reticle enhancement 47 carbon nanotube transistors 47 sintering 47 multiphoton 47 CMOS transistors 47 nanoimprint lithography NIL 47 Cadmium Telluride CdTe 47 Intermolecular 47 Complementary Metal Oxide Semiconductor 47 NSR S#C 47 silicon foundries 47 SunFab 47 MiaSolé 47 picosecond lasers 47 darkfield 47 ultrafast laser 47 parabolic trough solar 47 diode pumped 47 CoO 47 CIGS copper indium 47 Raman spectrometer 47 SOI wafer 47 3W LED 47 ion implant 47 pulsed lasers 47 Gallium Arsenide 47 CIGS thin film 47 CIS CIGS 47 CMOS silicon 47 nanometer CMOS 47 optical interconnects 47 nanophotonics 47 Xenics 47 Nantero 47 Picolight 47 nanoimprinting 47 Nanoindentation 46 Adaptive optics 46 Structured ASIC 46 EVG# 46 evanescent wave 46 attosecond 46 optoelectronic 46 nm CMOS process 46 monocrystalline silicon 46 AIX #G# 46 PV module 46 cadmium telluride CdTe 46 #LP [002] 46 planar waveguide 46 microreactors 46 gallium arsenide 46 SolarWindow 46 chipmaking 46 QDs 46 MagnaChip 46 Silicon CMOS Photonics 46 Crolles2 Alliance 46 MOCVD reactors 46 LCLS 46 silicon germanium SiGe 46 Nextreme 46 wavelength lasers 46 solar photovoltaics PV 46 Tachyon OPC + 46 nanomanufacturing 46 Thin Film Solar 46 Aixtron 46 centrotherm 46 STT RAM 46 SolarWindow TM 46 Imprio 46 ion traps 46 sapphire substrate 46 HelioVolt 46 Copper Indium Gallium Selenide 46 k gate dielectrics 46 coater developer 46 SWCNT 46 flexible OLEDs 46 sapphire wafers 46 virtual prototyping 46 LPCVD 46 CIGS solar cell 46 Litho Forum 46 ASML lithography 46 silicon waveguide 46 millisecond annealing 46 shearography 46 #nm MirrorBit 46 Suss MicroTec 46 nanometer scale 46 flexible substrates 46 #nm fabrication 46 nm DRAM 46 SOLARIS 46 HB LEDs 46 X FAB 46 electron microscopy 46 photodiode 46 photonic crystal 46 interferometric 46 high voltage BCDMOS 46 tunable lasers 46 sub #nm CMOS 46 HORIBA Jobin Yvon 46 scanning electron microscope SEM 46 hydride vapor phase 46 PROLITH 46 microelectromechanical systems MEMS 46 nanoscale characterization 46 diode lasers 46 EDXRF 46 5μm 46 purity silicon 46 correction OPC 46 LED Illuminator 46 SoC 46 aluminum nitride 46 excimer 46 photoemission 46 SMIC #.#um 46 epitaxy HVPE 46 TSMC Fab 46 UV VIS 46 Unidym 46 nanoparticle inks 46 SiGe C 46 CdTe solar 46 Amorphous silicon 46 plasmonic 46 CIGS modules 46 pMOS 46 Gallium Nitride GaN 46 optical microscope 46 silicon oscillators 46 SOI substrates 46 #nm chips 46 micromachining 46 CMOS scaling 46 Veeco MOCVD 46 Timbre Technologies 46 anneal 46 OLEDs 46 HEMTs 46 Phison 46 polysilicon 46 epiwafers 46 DCG Systems 46 solder bump 46 microshutters 46 #.#um [002] 46 Nanosolar 46 silicon substrates 46 Semicon 46 Femtosecond 46 substrates 46 productization 46 gate dielectrics 46 design kits PDKs 46 indium gallium arsenide 46 CPV solar 46 Joanne Itow 46 Flip Chip 46 diode laser 46 ECPR 46 cryogenically cooled 46 quantum dots 46 SolFocus 46 nanodevice 46 PANalytical 46 laser diode module 46 Brion Technologies 46 InPhase 45 Luxtera 45 AlGaN 45 LDMOS 45 Cree GaN 45 terahertz imaging 45 WLCSP 45 DDR3 chips 45 wafer probing 45 magnetron 45 AlGaAs 45 Free Electron Laser 45 transistor circuits 45 #nm laser [002] 45 photovoltaic 45 NANOIDENT 45 SemiLEDs 45 silicon substrate 45 hafnium oxide 45 Alanod Solar 45 IQ Aligner 45 HfSiON 45 Tokyo Electron Limited 45 ultrafast lasers 45 tunable RF 45 nonpolar GaN 45 OVPD 45 superconducting materials 45 MRAM 45 NREL 45 artificial photosynthesis 45 perpendicular recording 45 Superspeed USB 45 lithographic processes 45 optical disc 45 FT IR 45 #nm transistors 45 SkyTrough 45 ASML immersion 45 FeRAM 45 high temperature superconductivity 45 Sofradir 45 antireflective coating 45 Patterning 45 #nm fab 45 indium tin oxide ITO 45 mask aligner 45 semiconductor fabs 45 Mask Aligner 45 microfocus X ray 45 laser sintering 45 SQUIDs 45 PolyJet Matrix TM 45 carbon nanotube 45 photopolymer 45 #.#u 45 fluorescence spectroscopy 45 LTPS TFT 45 monolithically integrated 45 Advanced LIGO 45 D1X 45 mmWave 45 Helios XP 45 Concentrated Solar Power 45 epi wafers 45 multicrystalline 45 photovoltaics 45 oxyfuel combustion 45 #nm lithography [002] 45 monochromators 45 metallisation 45 hyperspectral imager 45 Negevtech 45 Thin Film 45 high-k/metal-gate 45 Si substrates 45 #mm MEMS 45 Amorphous Silicon 45 International Sematech 45 SPIE Advanced Lithography 45 IAUS 45 RF CMOS 45 Organic Photovoltaics 45 micromirror 45 Kotura 45 cathode materials 45 GaN transistors 45 package SiP 45 nanometer microprocessors 45 solution processable 45 #nm Buried Wordline 45 oxide thickness 45 chemically amplified 45 Laser VCSEL 45 multicrystalline silicon 45 Eudyna 45 Dektak 45 mm fab 45 GX# [003] 45 lithium titanate 45 photocatalysts 45 KLA Tencor 45 silicon nitride 45 Sulfurcell 45 SiGe bipolar 45 ion implanter 45 nanophotonic 45 outcoupling 45 sol gel 45 Vistec 45 electromigration 45 #.#μm CMOS process 45 photonic crystal fibers 45 Silicon Germanium 45 GenISys 45 millimeter wave mmWave 45 Innovalight 45 nanocomposite materials 45 annealing 45 ReRAM 45 #um [002] 45 Gallium nitride 45 nanofilm 45 ON Semi 45 reflow soldering 45 Photovoltaics 45 nanoscale 45 Virtutech 45 electron beam welding 45 AMOLEDs 45 #nm CMOS [002] 45 BridgeLux 45 CMOS processes 45 wph 45 conductive polymer 45 Electron Mobility Transistor 45 Osram Opto 45 High Brightness LED 45 Lasertec 45 photoelectron spectroscopy 45 thermoelectric materials 45 Spintronics 45 Raman Spectroscopy 45 litho 45 Elpida #nm 45 CdTe Si 45 ZnS 45 CdTe thin film 45 Concentrating solar 45 optical microscopy 45 millimeter wave 45 CIGS solar panels 45 solder paste 45 DongbuAnam 45 laser annealing 45 singulation 45 violet laser 45 nanoindentation 45 silicon MEMS 45 NEXX Systems 45 crystalline silicon photovoltaic 45 Richard Brilla CNSE 45 kit PDK 45 nanocrystalline silicon 45 TWINSCAN 45 TQP# 45 MAPPER 45 ErSol 45 CMOS imagers 45 VLTI 45 HiPER 45 planarization 45 ASML EUV 45 Alchimer 45 synchrotron radiation 44 wide bandgap 44 Macronix 44 plasmonics 44 Micromorph 44 CyberOptics 44 e beam DFEB 44 stereolithography 44 semiconductor nanowires 44 microdisplay 44 tunable 44 SiTime 44 nanopillar 44 nanostructured surfaces 44 superconducting 44 Single Wafer 44 QLED 44 UV Visible 44 Pranalytica 44 IMFT 44 HamaTech APE 44 monocrystalline cells 44 K dielectrics 44 nanoelectronics 44 dye sensitized 44 microinverters 44 NOR flash 44 Esatto Technology 44 wafer metrology 44 concentrating photovoltaics 44 wide bandgap semiconductor 44 silicon PV modules 44 JFET 44 Flexfet 44 NanoOpto 44 Co2 laser 44 FT NIR 44 dye sensitized cells 44 Sigma fxP 44 electroluminescence 44 Dresden fab 44 Micron 44 superlens 44 Moritex 44 reactive ion 44 indium phosphide 44 wafer prober 44 Si wafers 44 polycrystalline 44 femtosecond laser pulses 44 wafer bumping 44 SoloPower 44 MRAMs 44 structured ASICs 44 VIISta 44 MOS transistor 44 Cadmium Telluride 44 X ray absorption spectroscopy 44 synchrotron 44 laser welding 44 CPV modules 44 epiwafer 44 LTPS 44 IDMs 44 photometer 44 DDR2 DRAM 44 transistor 44 laser diode modules 44 subwavelength 44 transistor scaling 44 wafer dicing 44 conductive coatings 44 ultraviolet lasers 44 cmos 44 photonic lattice 44 micro inverter 44 Cadence Encounter 44 TWINSCAN XT #i 44 UltraCMOS 44 Insulator SOI 44 CNSE 44 nm NAND 44 CRIUS II 44 optical 44 CMOS logic 44 Bridgelux 44 CIGS Copper Indium 44 XMM Newton 44 photolysis 44 Intematix 44 flexible CIGS 44 synchrotron x ray 44 Silicon photonics 44 Novellus SABRE 44 Semiconductors ITRS 44 ThermaVolt II 44 Miyachi Unitek 44 SpectraWatt 44 nanoantenna 44 ULIS 44 #μm thick [002] 44 GDSII 44 lasing 44 Buried Wordline technology 44 nanometer nm 44 Oerlikon Solar 44 Solexant 44 SiC wafers 44 Hoku Membrane 44 imec 44 nanofilms 44 crystalline PV modules 44 CMOS wafers 44 TMOS display 44 HVPE 44 collimators 44 vanadium dioxide 44 SkyFuel 44 PolyMax 44 AlGaInP 44 ArctiCore 44 Gildas Sorin CEO 44 DMFC 44 Holographic Versatile Disc HVD 44 XDR DRAM 44 MetaRAM 44 leakage currents 44 sintered 44 solder bumping 44 vertical cavity 44 electrochemical 44 temporary wafer bonding 44 scintillator 44 systems substrate bonders 44 waveguide 44 copper indium gallium diselenide 44 Picogiga 44 Sunfilm 44 prototyping 44 superconducting wire 44 active matrix OLEDs 44 diode LED 44 interposers 44 Silicon carbide 44 GaAs HBT 44 nanocomposite material 44 detector arrays 44 phototransistors 44 optical transceiver 44 thermo mechanical 44 GaN wafer 44 shrinking geometries 44 solariX 44 Displaytech 44 Si substrate 44 Miasole 44 nanosilicon 44 antireflection 44 ultrahigh resolution 44 UV curing 44 optical modulator 44 millimeter wafers 44 #nm MLC 44 PowerTheater 44 nMOS 44 NAND Flash memory 44 vibrational spectroscopy 44 SCHOTT Solar 44 Dimatix 44 DualBeam 44 GWs 44 HKMG technology 44 deep silicon etch 44 SVTC 44 Zenasis 44 Lightwave Logic 44 crystalline silicon solar 44 Concentrated solar 44 #μm [001] 44 HBLEDs 44 wafer fab 44 high purity polysilicon 44 #.#μ 44 optical interconnect 44 DFM DFY 44 gallium arsenide cells 44 VHESC 44 lithographic techniques 44 optical coatings 44 lensless 44 multichip 44 through silicon vias 44 PV concentrator 44 Texas Instruments DLP 44 microfluidics 44 DRIE 44 insulator substrate 44 PVD CVD 44 oxide semiconductor 44 copper indium gallium 44 lm W 44 RF MEMS switches 44 Flex OneNAND 44 PLED 44 NEXX 44 Firecomms 44 Structured ASICs 44 Quartz DRC 44 JSR Micro 44 SoloPower flexible 44 Organic Light Emitting 44 quantum cascade 44 GaAs wafers 44 ATDF 44 synchrotrons 44 SEMATECH 3D 44 AMAT 44 polariton 44 violet lasers 44 centrotherm photovoltaics 44 polysilicon ingot 44 Copper Indium Gallium 44 Dongbu HiTek 44 Verisurf 44 Focused Ion Beam 44 germanium 44 Zecotek MAPD 44 amorphous alloy transformer 44 Epson Toyocom 43 x 9mm 43 MOCVD reactor 43 reconfigurable computing 43 HCPV panels 43 photonic 43 photonic bandgap 43 MMICs 43 String Ribbon solar 43 Ziptronix 43 semiconductor metrology 43 Scanning Probe 43 #nm HKMG