Related by context. Frequent words. (Click for all words.) 68 dielectrics 67 electron mobility 63 #nm CMOS [001] 62 ZnO 61 #nm node [001] 61 copper interconnects 61 semiconducting 61 silicon germanium 61 submicron 61 silicon 60 dielectric constant 60 bandgap 60 VCSEL 60 nitride 60 #μm [001] 60 transistor 59 FETs 59 nm node 59 SiC 59 photodetectors 58 planar 58 polycrystalline 58 silicon substrate 58 amorphous silicon 58 CNTs 57 photonic crystal 57 TSVs 57 nanometer 57 waveguides 57 dielectric 57 substrate 57 EUVL 57 #nm [001] 57 Nanowires 56 monolayer 56 silicon nanowires 56 nm 56 nanocrystal 56 silicon oxide 56 hafnium 56 SiGe 56 metallization 56 #.#μm [002] 56 CMOS 56 graphene sheets 56 ferroelectric 56 SiO2 56 BiCMOS 56 gallium nitride 55 graphene 55 epitaxial 55 insulator SOI 55 InP 55 epitaxy 55 Nanometer 55 flexible substrates 55 plasmonic 55 gallium arsenide 55 nanowire 55 carbon nanotube 55 carbon nanotubes 55 metal oxide 55 germanium 54 Substrates 54 GaN 54 EUV lithography 54 MOSFET 54 anisotropic 54 nanometer scale 54 immersion lithography 54 photodiode 54 conductivity 53 inductance 53 micron 53 interfacial 53 electromagnetic interference EMI 53 optical lithography 53 Novaled 53 GaAs 53 manufacturable 53 gallium nitride GaN 53 geometries 53 resonators 53 backplanes 53 ferromagnetic 53 isotropic 53 processability 53 modulus 53 substrates 53 nanoscopic 53 nanotube 53 microfluidic devices 52 anion 52 diodes 52 polymeric 52 diode 52 #nm [002] 52 SOI 52 nanowires 52 nanocomposites 52 manufacturability