Related by context. Frequent words. (Click for all words.) 73 dielectrics 68 dielectric constant 67 electron mobility 66 nitride 66 hafnium 65 ZnO 65 silicon nitride 65 SiO2 65 copper interconnects 64 polycrystalline 64 #nm node [001] 64 silicon germanium 64 PZT 64 silicon 64 dielectric 63 epitaxy 63 nanocrystal 63 silicon dioxide 63 submicron 63 silicon substrate 63 ferromagnetic 63 ferroelectric 63 semiconducting 63 bandgap 61 TSVs 61 SiC 61 InP 61 substrate 61 epitaxial 61 planar 60 germanium 60 silicon oxide 60 ferrite 60 interfacial 60 insulator SOI 59 geometries 59 photodetectors 59 photonic crystal 59 nanometer scale 59 SiGe 59 CMOS 59 amorphous silicon 59 #nm CMOS [001] 59 nm node 59 #μm [001] 59 gallium nitride 59 Germanium 58 gallium arsenide 58 #.#μm [002] 58 FETs 58 gallium nitride GaN 58 transistor 58 polymeric 58 SWNTs 58 metallization 58 anisotropic 58 BiCMOS 58 substrates 58 nanocomposites 58 GaN 58 thermal conductivity 57 GaAs 57 photoresist 57 nanoscale 57 nanocrystals 57 nanostructures 57 capacitance 57 monolayer 57 microstructures 57 waveguides 57 VCSEL 57 nanowire 57 CNTs 57 conductivity 57 immersion lithography 57 functionalized 57 metal oxide 57 sub micron 56 multilayer 56 Nanowires 56 nano scale 56 nanometer 56 photolithography 56 electrical conductivity 56 conformal 56 microfabrication 56 manufacturable 56 photodiode 55 graphene sheets 55 flexible substrates 55 capacitors 55 TiO 2 55 nanostructure 55 quantum dots 55 nanostructured materials 55 photonic 55 transistors 55 optical lithography 55 analog circuits 55 nanometer sized 55 nanoscopic