Related by context. Frequent words. (Click for all words.) 71 copper interconnects 71 dielectrics 67 silicon germanium 67 insulator SOI 66 #.# micron CMOS 65 through silicon vias 64 CMOS processes 64 BiCMOS 63 silicon 63 nitride 63 dielectric 63 CMOS logic 62 TSVs 62 gate dielectric 62 dielectric constant 62 #nm node [001] 62 RF CMOS 61 optical interconnect 61 SiGe 61 immersion lithography 61 submicron 61 smaller geometries 61 InGaN 60 electron mobility 60 epitaxial 60 CMOS 60 InGaAs 60 HKMG 59 #.#μm [002] 59 indium phosphide 59 nm node 59 #/#nm 59 optical lithography 59 hafnium 59 metallization 59 silicon nitride 59 VCSELs 59 wafer bonding 58 gallium nitride 58 SiO 2 58 micromachining 58 Flip Chip 58 ferrite 58 TFTs 58 interconnects 58 planar 58 ferroelectric 58 SOI wafers 58 analog circuits 58 photonic devices 58 porous silicon 58 eDRAM 57 thermal conductivity 57 dopant 57 High Voltage CMOS 57 photodetectors 57 sub micron 57 epitaxy 57 optical interconnects 57 PZT 57 extendibility 57 Nanometer 57 nanocrystal 57 #nm CMOS [001] 57 microfabrication 57 LDMOS 56 dispersive 56 silicon transistors 56 microelectronic devices 56 WLCSP 56 SiGe BiCMOS 56 backplanes 56 thermally conductive 56 ferromagnetic 56 InP 56 EUV lithography 56 photolithography 56 #μm [002] 56 SRAMs 56 polycrystalline 56 geometries 56 #-Gbit/sec 56 silicon oxide 56 #nm [001] 55 flexible substrates 55 GaN 55 nanometer 55 gallium nitride GaN 55 annealing 55 #.#um [002] 55 photonic integration 55 Tunable 55 TSMC #nm [001] 55 SiC 55 thermal dissipation 55 lithography 54 architectures 54 SerDes 54 #μm [001] 54 germanium 54 NOR Flash memory