Related by context. Frequent words. (Click for all words.) 65 microfabrication 63 photolithography 62 electron beam lithography 61 deburring 61 MALDI 60 nanostructured materials 60 conformal coating 59 PZT 59 epitaxy 59 microfluidic devices 59 laser welding 59 dielectrics 59 silicon germanium 59 gallium nitride 59 wafer bonding 59 epitaxial 58 FT IR 58 nanofabrication 58 passivation 58 submicron 58 plasma etch 58 polymeric materials 58 microscale 58 laser ablation 58 polycrystalline 58 physical vapor deposition 58 InGaAs 57 photodetectors 57 wafer bumping 57 optical microscopy 57 MEMS 57 through silicon vias 57 silicon nitride 57 microstructures 57 nitride 57 photonic devices 56 DRIE 56 femtosecond laser 56 ion implantation 56 leadframe 56 microfluidics 56 sub micron 56 nanometer scale 56 opto electronic 56 nanoscale structures 56 High Voltage CMOS 56 microelectronic devices 55 #μm [002] 55 photomasks 55 chemical vapor deposition 55 microelectromechanical systems MEMS 55 waterjet cutting 55 femtosecond 55 ion beam 55 planar 55 conformal 55 photoresist 55 substrates 55 immersion lithography 55 SiC 55 precision machining 55 fiber lasers 55 electrochemical 55 metallization 55 micro electromechanical systems 55 photonic crystals 55 intravascular 54 geometries 54 machining 54 chemical mechanical planarization 54 waveguides 54 metrology 54 optical biosensors 54 nano scale 54 electrically conductive 54 block copolymers 54 optical lithography 54 excimer laser 54 microfluidic 54 Raman spectroscopy 54 confocal 54 gallium nitride GaN 54 piezoelectric 54 GaN 54 sintered 54 waveguide 54 thermally conductive 54 PECVD 54 MEMs 54 annealing 54 Nanowires 54 Nanometer 54 ZnO 54 nano structured 54 nanoscale 54 silicon substrate 54 anisotropic 54 BiCMOS 54 protein purification 54 diffractive 54 μm