Related by context. Frequent words. (Click for all words.) 64 DRIE 63 micromachining 63 submicron 62 silicon substrates 62 plasma etch 61 sub micron 61 through silicon vias 61 nanolithography 60 photoresists 60 microchannels 59 electron beam lithography 59 epitaxy 59 wafer bonding 59 photolithography 59 metallization 59 passivation 58 InGaN 58 photodetectors 58 epitaxial 58 microchannel 58 conductive inks 58 semiconductor wafer 58 nanocrystalline 57 physical vapor deposition 57 BiCMOS 57 optical coatings 57 pultrusion 57 silicon substrate 57 capillary electrophoresis 57 High Voltage CMOS 57 microfabrication 57 indium phosphide 57 photoresist 57 conductive polymer 57 oxide layer 56 microstructures 56 thermally conductive 56 dielectrics 56 leadframe 56 nanopores 56 CMOS logic 56 polymer matrix 56 InGaAs 56 SOI wafers 56 copper interconnects 56 #μm [002] 56 silicon nitride 56 vias 56 #.#μm [002] 56 porous silicon 56 laminations 56 wafer bumping 56 photodetector 56 photodiode 56 AlN 55 dopant 55 substrate 55 microporous 55 diode laser 55 laser welding 55 photomasks 55 silicon wafer 55 conformal coating 55 CMOS processes 55 Flip Chip 55 micro optics 55 fluoropolymer 55 deburring 54 sintered 54 ion implantation 54 laser ablation 54 logic CMOS 54 silicon germanium 54 TSVs 54 #.# micron CMOS 54 #.#μm [001] 54 block copolymer 54 PECVD 54 ultrasonics 54 polymerisation 54 ion beam 54 compression molding 54 glass substrate 54 immersion lithography 54 encapsulant 54 Alchimer 54 UHPLC 54 dielectric 54 polycrystalline 54 micron 54 microelectromechanical systems MEMS 54 diffractive 54 vacuum furnace 54 #/#-in [001] 54 low k dielectric 54 electrically conducting 54 UV LED 54 lithography 53 nano structured 53 MALDI 53 flexible substrates