Related by context. Frequent words. (Click for all words.) 62 submicron 62 microfabricated 61 opto mechanical 60 nanomechanical 59 semiconducting materials 59 microelectronic devices 59 vapor deposition 59 spectral imaging 59 microdevices 58 nanoporous 58 Nanometer 58 force microscopy AFM 58 dielectrics 57 micromachining 57 nanolithography 57 spintronic devices 57 layer deposition ALD 56 photonic devices 56 dielectric materials 56 optical biosensors 56 Nanotube 56 temperature superconducting 56 nanocrystalline 56 k dielectrics 56 AFMs 55 MEMs 55 BEOL 55 low k dielectrics 55 silicon 55 vertical cavity 55 micro machining 55 micro optics 55 geometries 55 microfabrication 55 spintronic 55 Ruthenium 55 Silicon Carbide 55 #nm silicon 55 ultrasmall 55 gate electrode 55 fused silica 55 AlGaN 55 Gallium Nitride 55 Flip Chip 55 superlens 55 indium phosphide 55 nanoscopic 55 FeRAM 54 nanosized 54 oxide layer 54 focused ion beam 54 nanoelectronic 54 stereolithography 54 photodetector 54 copper interconnects 54 microelectronic components 54 silicon substrates 54 indium tin oxide ITO 54 #.# micron CMOS 54 cathode materials 54 porous silicon 54 Nanowire 54 nanoparticulate 54 silicon CMOS 54 Miniaturization 54 graphene transistors 54 tomographic 54 Atomic Layer Deposition 54 epitaxy 54 nanorod 54 optical microscopes 54 RRAM 54 Nanowires 54 Superconducting 54 silicon germanium 54 ytterbium 54 through silicon vias 53 boron nitride 53 InGaN 53 ferromagnetic 53 sensor arrays 53 CMOS compatible 53 microscopy techniques 53 titanium alloys 53 gate dielectric 53 Microfluidic 53 Piezoelectric 53 scanning electron microscopy 53 macroscale 53 magnetic particle 53 photonic crystal 53 semiconducting 53 UNCD 53 thermoelectric materials 53 SWCNT 53 ceria 53 VCSELs 53 #nm #nm [005] 53 magnetron 53 nanometer scale 53 microfluidic devices