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(Click for frequent words.) 72 AlN layer 71 Si substrate 70 epitaxial layer 70 InAs 70 SiO 2 69 1μm 68 electrically insulating 67 5μm 67 strontium titanate 67 2μm 67 dielectric layer 66 aluminum nitride 66 μm thick 66 dielectric layers 66 gate electrode 66 μm diameter 65 ZnO nanowire 65 cuprate 65 AlN 65 boron nitride 65 Fig. 1a 65 antiferromagnetic 65 SWCNT 65 ZnSe 65 Fig. 2b 65 uniaxial 64 dopant 64 crystallinity 64 multilayers 64 nanometric 64 AlGaN 64 silicide 64 microcavities 64 coplanar 64 Fig. 3b 64 CdS 64 Fig. 2a 64 GaN layers 64 hexagonal lattice 64 self assembled monolayer 64 antiparallel 64 dopants 64 epitaxial layers 64 YBCO 64 martensite 64 eutectic 64 stripline 63 hafnium oxide 63 Fig. 1c 63 tensile stress 63 sapphire substrate 63 undoped 63 superlattice 63 MOS transistors 63 ZnO 63 indium arsenide 63 microcavity 63 TiN 63 coverslip 63 Si substrates 63 silicon Si 63 thermally activated 63 #μm [002] 63 icosahedral 63 passivated 63 CMOS transistors 63 Raman spectra 63 crystallographic 63 #um [001] 63 mu m 63 heterostructure 63 biaxial 63 silicon substrates 63 compressive stress 63 Fig. 3A 63 manganite 63 block copolymer 63 colloidal crystals 63 intramolecular 63 toroid 63 MWNT 63 hexamers 63 GaP 62 Schematic illustration 62 martensitic 62 pentacene 62 micrometer scale 62 PIN photodiode 62 Schottky barrier 62 fluorescence emission 62 SDS PAGE 62 fig. S1 62 ZnS 62 pearlite 62 crystal lattices 62 Josephson junctions 62 SWNT 62 monolayers 62 nanorod 62 substrate 62 agarose gel 62 mesoporous 62 κ 62 #nm #nm [002] 62 tetragonal 62 CdSe 62 LiNbO3 62 CuO 62 pMOS 62 silicon substrate 62 #um [002] 62 spherical particles 62 #.#um [001] 62 NWs 62 lanthanum aluminate 61 dipole moment 61 doped silicon 61 voltage divider 61 Fig. 1A 61 ZrO 2 61 Fig. 1d 61 cuvette 61 magnesium ion 61 gate dielectrics 61 pn junction 61 SiO2 61 bilayers 61 fig. S2 61 lattice mismatch 61 nematic 61 Fig. 4b 61 nonconducting 61 bilayer 61 oxide layer 61 GaN substrates 61 Schematic representation 61 calcium fluoride 61 CCD detector 61 silica substrate 61 electron doped 61 dipolar 61 polypeptide chain 61 ε 61 MWCNTs 61 Josephson junction 61 passivation layer 61 paramagnetic 61 semiconductor nanowires 61 microfluidic channels 61 vanadium oxide 61 ferrite 61 micrometer sized 61 indium phosphide InP 61 graphene layers 61 isomeric 61 monolayer 60 λ 60 lithographically 60 subwavelength 60 polyaniline 60 vibrational modes 60 nucleation layer 60 solder bumps 60 ssDNA 60 dielectrics 60 spheroidal 60 Fig. 3c 60 nonmagnetic 60 cm ^ sup 60 CMOS circuits 60 5nm 60 Fig. 3a 60 carbides 60 #μm [001] 60 GaN wafers 60 thermal conductivities 60 conductive epoxy 60 #.#μm [001] 60 nitride semiconductor 60 Fig. 2C 60 microfabricated 60 electrospray 60 nanoribbon 60 perovskite 60 NiSi 60 cementite 60 iron carbide 60 nMOS 60 silica spheres 60 reflowed 60 absorption spectra 60 crystallites 60 optical waveguides 60 layer graphene 60 k dielectric 60 nitride layer 60 SiON 60 polymer matrix 60 APTIV film 60 heterostructures 60 microstrip 60 thermo mechanical 60 silicon atoms 60 indium gallium arsenide 60 atomic lattice 60 magnetic permeability 60 rotaxanes 60 poly L lysine 60 ultrasonic vibrations 60 ferrite core 60 aligned carbon nanotubes 60 nanomesh 60 gelation 60 graphene sheet 60 anodic 60 bandgaps 60 4H SiC 60 P3HT 60 streptavidin 60 valence band 60 GaAs substrate 60 powder diffraction 60 superlattices 60 resistive element 60 optically coupled 59 intergranular 59 photon energies 59 HfSiON 59 PEDOT PSS 59 zirconium oxide 59 zinc oxide nanowires 59 hydride vapor phase 59 ν 59 InGaAs 59 silicate glass 59 ^ sup -1 59 compressive strain 59 Fig. 1b 59 absorption coefficient 59 FinFET 59 elastic modulus 59 Young modulus 59 capacitances 59 Mott insulator 59 microtubes 59 Fig. 4a 59 toroidal 59 InSb 59 heterojunctions 59 interdigitated 59 micron thick 59 piezoelectric ceramic 59 laminar 59 collagen fibrils 59 hollow spheres 59 fig. S6 59 Bragg reflector 59 lattice vibrations 59 silicon nitride 59 recrystallization 59 polariton 59 ferrites 59 σ 59 x ray absorption spectroscopy 59 proteinaceous 59 Supplementary Fig 59 linearly polarized 59 pipette tip 59 Mg Fe 59 indenter 59 honeycomb structure 59 HEMTs 59 Fig. 2B 59 cryostat 59 crystallite 59 GNRs 59 electron density 59 parasitic inductance 59 magnetization 59 X ray absorption spectroscopy 59 catalytically active 59 aliquots 59 inhomogeneity 59 thermally stable 59 QDs 59 Fig. 2A 59 orbitals 59 modulus 59 valence electron 59 anneal 59 epitaxially grown 59 anisotropic 59 cm ² 59 superconducting qubit 59 graphene nanoribbons 59 colloidal particles 59 photocurrent 59 coercivity 59 dissipative 59 nonpolar 59 tensile strain 59 Fig. 3d 59 perpendicular magnetic 59 epitaxially 59 passivation 59 PEDOT 59 epitaxial 59 compressive stresses 59 type ZnO nanowires 59 lamina 59 magnetron sputtering 59 mosfet 59 W mK 58 SWNTs 58 PbS 58 fluorescence intensity 58 heterojunction 58 1nm 58 Silicon Nitride 58 Brillouin zone 58 cm -2 58 InGaN 58 Nova NanoSEM 58 spectroscopic techniques 58 x ray diffraction 58 graphene nanoribbon 58 polystyrene beads 58 #.#in [004] 58 γ 58 thermal decomposition 58 elastic deformation 58 cadmium sulfide 58 β galactosidase 58 fibrillar 58 semiconducting 58 self assembled monolayers 58 transconductance 58 diffraction grating 58 figs. 58 NMR spectra 58 submicrometer 58 magnetic excitations 58 #nm laser [001] 58 crosslinking 58 PIN diode 58 thermowell 58 2nm 58 #nm wavelength [001] 58 agarose 58 alkali metal 58 nanopowder 58 Fig. 4B 58 PMOS transistors 58 nanostructured silicon 58 nanoribbons 58 isotropic 58 dielectric permittivity 58 silicon nanowire 58 parasitic capacitance 58 Supplementary Figs 58 delocalized 58 ohmic contacts 58 GaSb 58 3mm x 58 polymer substrate 58 conductivities 58 ferromagnetic 58 micrometre scale 58 chromatogram 58 #.#nm [002] 58 ferromagnetism 58 silica nanoparticles 58 nanocrystalline 58 microcrystalline 58 bipolar transistor 58 walled carbon nanotube 58 adsorbate 58 aqueous dispersion 58 atomically smooth 58 frictional heating 58 dielectric materials 58 transistor arrays 58 gaussian 58 magnetostrictive 58 weight polyethylene UHMWPE 58 biotinylated 58 dielectric constant 58 metallic ions 58 metallisation 58 melt viscosity 58 AlGaN GaN 58 measuring #.#mm x [001] 58 #.#mm diameter [002] 58 Nd YAG 58 composite laminates 58 #.#x#.#mm 58 feedthrough 58 yttria stabilized zirconia 58 Si SiGe 58 spectroscopic analysis 58 linearized 58 quasicrystal 58 threshold voltages 58 pellicle 58 6nm 58 nanotubes nanowires 58 SiO 58 yttrium barium copper 58 -# ° [002] 58 hematoxylin 58 oligomer 58 molecular orbitals 58 photopolymer 58 nanolayers 58 collimated 58 micropipette 58 cyclization 58 Fig. 4A 58 graphene sheets 58 micron diameter 58 absorption spectroscopy 58 lamella 58 electron transistor 58 laser excitation 58 ablator 58 FTIR spectrometer 58 intracavity 58 stilbene 58 silicon dioxide SiO2 58 solvation 58 cm -1 57 photoconductive 57 UV absorbance 57 τ 57 semiconducting material 57 PLLA 57 microgel 57 fluorogenic 57 autosampler 57 unreacted 57 biphenyl 57 ultrasonic vibration 57 anisotropy 57 polyhedral 57 F actin 57 Fabry Perot 57 photodiode 57 massive sulphide horizons 57 glass frit 57 extrudate 57 dispersive 57 Transparent Conductive Oxide TCO 57 #pin [001] 57 tetrahedral 57 nitride 57 fluorapatite 57 indium tin oxide ITO 57 spherical nanoparticles 57 graphene flakes 57 spheroids 57 microcapillary 57 ferroelectrics 57 magnetic particle 57 midplane 57 monochromator 57 protein adsorption 57 post perovskite 57 dielectric 57 Bose Einstein Condensate 57 PEEK OPTIMA 57 NaOH 57 intermetallic 57 nanochannels 57 nanotube arrays 57 photoluminescence 57 semiconductor nanocrystals 57 Mosfets 57 microfluidic chips 57 silicon waveguide 57 bandpass filter 57 semiconductive 57 toroids 57 PCBM 57 thermal conduction 57 rheological 57 TappingMode 57 nanodots 57 δ 57 photoemission 57 Figure 1C 57 MoS2 57 MQW 57 thermoplastic polyester 57 Aerogels 57 ultrahigh vacuum 57 epitaxy HVPE 57 exciton 57 silicon oxide 57 multiwalled 57 monolithically integrated 57 lipid bilayer 57 nanoholes 57 thermal diffusivity 57 nano porous 57 crustal rocks 57 anion 57 diffusion coefficient 57 m z 57 UV VIS 57 MAX# integrates 57 silicon waveguides 57 #x#x# mm [002] 57 carbon nanotube CNT 57 thermodynamic equilibrium 57 FinFETs 57 quantum oscillations 57 bilayer graphene 57 QFNs 57 copper oxide superconductors 57 ferroelectricity 57 electrochemically 57 friction coefficients 57 polymerized 57 endonuclease 57 twin screw extruder 57 austenitic stainless steel 57 semiconducting materials 57 Fig. 1C 57 denaturation 57 reflow soldering processes 57 Fig. 4c 57 UV photons 57 GaN substrate 57 θ 57 SiC substrate 57 crystal lattice 57 nanobubble 57 viscoelastic properties 57 tetrahedra 57 Bragg grating 57 μm 57 photolysis 57 JFET 57 nonequilibrium 57 thermally conductive 57 homopolymer 57 polaritons 57 trimers 57 rheometer 57 Bessel beam 57 HRTEM 57 organic TFTs 57 nanogels 57 #x# mm [004] 57 cm -3 57 coaxially 57 amplicon 57 SAXS 57 supramolecular 57 lithographically patterned 57 chemiluminescence 57 MgO 57 covalent bond 57 photomultiplier tubes 57 disulfide bond 57 AlGaAs 57 trabeculae 57 emission spectroscopy 57 honeycomb pattern 57 antibody antigen 57 ellipsoid 57 analyte 57 lamellar 57 chip resistor 57 #x# mm [003] 57 silicon oxynitride 57 waveguides 57 #S proteasome 57 silicon nanocrystals 57 Dirac fermions 57 insulator wafers 57 focused ion beam 57 nanoporous 57 epitaxial silicon 57 Carbon nanotube 57 beamsplitters 57 Ascentis Express 57 manganese oxide 57 metastable 57 electron tunneling 57 montmorillonite 56 5mm QFN package 56 nano particulate 56 Fe Mg 56 EMIF# 56 mT 56 viscoelasticity 56 colloidal crystal 56 magnesium Mg 56 optically pumped 56 molybdenum disulfide 56 tin Sn 56 steric 56 laminate substrate 56 polydimethylsiloxane 56 hexagonal pattern 56 BJTs 56 downconverter 56 capillary tube 56 magnetic stirrer 56 FeO 56 photoionization 56 titanium nitride 56 radially 56 heat spreader 56 inelastic scattering 56 desorbed 56 nanocluster 56 resonance frequency 56 etalon 56 silicon germanium SiGe 56 chromatograms 56 particulate contamination 56 spherical particle 56 ellipsometry 56 reactant 56 cuticular 56 nonlinear optical 56 polycrystalline 56 fused silica 56 lithographic processes 56 microlenses 56 superposed 56 fluorophore 56 Fig. 1D 56 photodiode array 56 centromeric 56 substituents 56 dielectric strength 56 nanobelts 56 GaN nanowires 56 static dissipative 56 donor acceptor 56 moduli 56 annealed 56 nanocrystalline diamond 56 athermal 56 zinc oxide ZnO 56 lipid vesicles 56 TEOS 56 borosilicate glass 56 lipid bilayers 56 chemically reactive 56 Field Effect Transistor 56 singlemode 56 #μm thick [002] 56 ARPES 56 nanosecond pulse 56 #μ 56 electroless copper 56 ferritic 56 submicron 56 tricalcium phosphate 56 dual damascene 56 fig. S3 56 ± #V [001] 56 4mm x 56 PIN photodiodes 56 #.#mm diameter [001] 56 #μF [001] 56 #degreesC 56 indium gallium phosphide 56 pyrophosphate 56 tin oxide 56 nanomechanical devices 56 ultrathin layer 56 interposer 56 photobleaching 56 histidine 56 laser interferometer 56 #mm# [002] 56 zinc selenide 56 flowability 56 nanofabricated 56 z axis 56 ferromagnet 56 cycloaddition 56 ZnO nanowires 56 crosslinked 56 electron orbitals 56 microstructured 56 #ppm ° C 56 cuvettes 56 titania nanotubes 56 micrometer thick 56 Fig. 1E 56 crystalline structure 56 microbeads 56 fullerene derivatives 56 x 9mm 56 N acetyl 56 gelsolin 56 aluminum arsenide 56 dI dV 56 femtogram 56 magnetically coupled 56 titanium aluminide 56 AFM cantilever 56 hydrophobic interactions 56 photonic crystal 56 PIN diodes 56 indium gallium phosphide InGaP 56 capillary tubes 56 gallium indium arsenide 56 fibrin gel 56 strange quark 56 clathrin 56 parasitic capacitances 56 diene 56 electrostatic attraction 56 lysates 56 antireflection 56 agarose gel electrophoresis 56 photodetector 56 Figure 1A 56 chipscale 56 ohmic 56 hydroxyphenyl 56 transimpedance amplifier 56 HfO2 56 photolithographic 56 bandgap 56 parylene 56 insulating substrate 56 photoresist 56 fs pulses 56 P0 56 micrometre 56 MWNTs 56 1mm thick 56 polybutadiene 56 equimolar 56 Yb 56 meV 56 lowpass filter 56 enthalpy 56 oppositely charged 56 microvia 56 microstructural 56 coiled coil 56 avalanche photodiode 56 lamellae 56 electrically conducting 56 lactone 56 weldability 56 cantilever deflection 56 aluminum heatsink 56 electronic excitations 56 #.#mm# [002] 56 diffusivity 56 aluminum oxide 56 supernatant 56 polar GaN 56 rotaxane 56 diffraction pattern 56 vesicle fusion 56 cadmium chloride 56 thermally 56 mK 56 resonators 56 Mosfet 56 Figure 4a 56 electrodeposition 56 #.#mm ² 56 polymeric 56 nanopillars 56 graphite oxide 56 TiO 56 scintillator 56 illumination microscopy 56 quartz crystal oscillator 56 shear modulus 56 aqueous solution 56 scanning electron microscopy SEM 56 specular reflectance 56 dimers 56 ciliated 56 chalcogenide 56 Silicon Germanium 56 centrifugation 56 Inconel 56 excellent solderability 56 aluminum fins 56 PowerPAK 56 #cm [001] 56 inductive sensor 56 titanium carbide 56 bypass capacitor 56 impedances 56 monodisperse 56 differential scanning calorimetry 56 microbalance 56 sol gel 56 TFTs 56 thermal EMF 56 resonant cavity 56 testo 56 anomalous dispersion 55 tetramers 55 tunable filter 55 formamide 55 #mTc 55 mm dia 55 phototransistor 55 Fractional N 55 covalent bonding 55 rotationally symmetric 55 metallic nanostructures 55 nonpolar GaN 55 hydrated electron 55 singulated 55 MWCNT 55 zener diodes 55 Ca2 + 55 emission spectra 55 thermodynamically stable 55 porphyrin 55 PBGA package 55 overmolding 55 Aâ 55 photoelectron spectroscopy 55 macrocycle 55 kT 55 functionalization 55 nanorings 55 sulfur atom 55 UHMW 55 x 3mm 55 Hastelloy 55 topological insulator 55 sapphire wafer 55 wirewound 55 polymerizes 55 #x#x# cm 55 spin precession 55 Cu interconnects 55 covalently attached 55 channel MOSFET 55 #.#nm [001] 55 coupling capacitors 55 electret 55 amyloid peptides 55 QMEMS 55 birefringence 55 complexation 55 quasiparticle 55 tribological 55 transistor amplifier 55 optically transparent 55 conjugated polymers 55 diffusive 55 granulate 55 electron scattering 55 circular dichroism 55 DNase 55 substrates 55 silica particles 55 BGA CSP 55 superconducting qubits 55 longitudinal axis 55 Fig. 1e 55 bismuth telluride 55 particle sizing 55 asphaltenes 55 HEMT 55 capacitive coupling 55 III nitride 55 underfill 55 piezoelectric actuator 55 concentrically 55 conjugated polymer 55 SQUIDs 55 Langmuir Blodgett 55 topological defects 55 honeycomb lattice 55 electroless nickel 55 hydrophobicity 55 #x#mm [005] 55 diffraction patterns 55 InGaAs InP 55 RecA 55 tetrahydrofuran THF 55 Fig. 3B 55 mm ² 55 parison 55 micrometre sized 55 thixotropic 55 laser scanning confocal 55 μl 55 waveguide 55 triaxial 55 bistable 55 sulfation 55 oxide thickness 55 microchannel 55 indium phosphide 55 photodiode arrays 55 absorber layer 55 electron bunches 55 microfocus 55 Vps# 55 coaxial connector 55 plasmon 55 electroactive 55 surface roughness 55 MESFET 55 conductive coating 55 titanium dome tweeter 55 chalcogenide glass 55 micropores 55 fluorescence detection 55 light emitting transistor 55 phototransistors 55 Î ¼ 55 DFT calculations 55 fig. S4 55 corrugation 55 epiwafers 55 alkene 55 exonuclease 55 granulates 55 platinum Pt 55 wavefunction 55 Experimentally 55 quinone 55 pn junctions 55 DS DBR 55 potassium atoms 55 velocity dispersion 55 cathodic 55 nanofilm 55 wetted parts 55 dimeric 55 AFM probes 55 emission wavelength 55 sub picosecond 55 cadmium selenide 55 MEMS resonators 55 micrograph 55 electrically isolated 55 conductive adhesives 55 overmolded 55 silicon nanoparticles 55 calcium pyrophosphate 55 hexose 55 lattice parameter 55 silicon crystals 55 Exoscan 55 photonic crystal fiber 55 inductive proximity 55 cobalt atoms 55 silicone carbide 55 site directed mutagenesis 55 epoxide 55 dopant atoms 55 ferromagnets 55 nonionic 55 crystal resonator 55 FWHM 55 QCLs 55 multilayer ceramic 55 fig. S5 55 ellipsoids 55 demagnetization 55 covalently bound 55 micelle 55 alternating layers 55 Photometer 55 lysate 55 magnetic particles 55 Fig. 2c 55 Bose Einstein condensate BEC 55 RGB pixels 55 VUV 55 hexamer 55 ab initio calculations 55 Unidirectional 55 aluminum nitride AlN 55 axially 55 helically 55 intermetallic compounds 55 PCR amplification 55 planarity 55 ionization mass spectrometry 55 #x#mm [002] 55 quantum cascade 55 NMOS 55 conductive polymer 55 InGaP