Related by context. All words. (Click for frequent words.) 73 CIGS copper indium 71 CIS CIGS 69 CIGS Copper Indium 69 copper indium gallium diselenide 69 copper indium gallium 68 crystalline silicon photovoltaic 67 Solibro 67 amorphous silicon Si 67 CdTe PV 67 crystalline silicon c 67 monocrystalline silicon 66 Polycrystalline 66 Cadmium Telluride 66 CIGSe 66 multicrystalline silicon 65 Copper Indium Gallium Selenide 65 CIGS cells 65 di selenide CIGS 65 Micromorph 64 cadmium sulphide 64 di selenide 64 semiconductive 64 CIGS photovoltaic PV 64 Silicon Solar Cells 63 cadmium telluride CdTe 63 heterojunction 63 SOI silicon 63 multijunction solar cells 63 laterally diffused metal 63 ZnS 63 Selenide 63 gallium selenide 63 CdTe solar 63 Gallium arsenide 63 CIGS PV 63 Cadmium Telluride CdTe 63 oxide semiconductor 63 magnetron sputtering 63 germanium substrates 62 silicon PV modules 62 polycrystalline solar 62 monocrystalline wafers 62 Si Ge 62 transparent conductive oxide 62 copper indium diselenide 62 insulator substrate 62 Uni Solar Ovonic 62 CIGS photovoltaic 62 Grätzel cells 62 PolyMax 62 amorphous silicon solar 62 CIGS panels 62 dye sensitized 62 epitaxial silicon 62 nitride semiconductor 62 absorber layer 62 UMG Si 62 hafnium oxide 62 Epitaxial 62 copper indium gallium selenide 62 Cadmium telluride 62 Gallium Nitride 62 crystalline Si 62 Multicrystalline 62 microcrystalline silicon 62 Si substrates 62 Chemical Vapor Deposition 62 Nanocomposite 61 Solid Oxide Fuel Cells 61 bulk heterojunction 61 nanocrystalline 61 film transistors TFTs 61 cadmium telluride 61 multicrystalline wafer 61 Amorphous Silicon 61 indium gallium nitride InGaN 61 mono crystalline solar 61 mono crystalline 61 CdSe 61 hetero junction 61 mono crystalline silicon 61 plasma etching 61 CIGS solar cells 61 transparent conductive 61 ionization mass spectrometry 61 Gildas Sorin CEO 61 silicon Si 61 aluminum nitride 61 Auria Solar 61 Gallium Arsenide GaAs 61 selenide 61 hydride vapor phase 61 Monocrystalline 61 copper indium gallium selenium 61 LPCVD 61 Si PV 61 epitaxy HVPE 60 CIGS solar panels 60 Thin Film Line 60 LiNbO3 60 monocrystalline polycrystalline 60 CdTe thin film 60 Organic Solar Cells 60 Nanostructured 60 micromorph 60 solar concentrator systems 60 aluminum gallium indium 60 ZnSe 60 silicon photovoltaic modules 60 CIGS CdTe 60 Avancis 60 monocrystalline solar 60 multicrystalline wafers 60 epitaxial wafers 60 solar photovoltaic cells 60 multicrystalline solar cells 60 Thin Film Transistors 60 monolithically integrated 60 CdTe 60 multicrystalline 59 multicrystalline silicon cells 59 pulsed laser deposition 59 Thin Films 59 multicrystalline silicon solar 59 organic TFTs 59 Würth Solar 59 HfSiON 59 CIGS solar 59 zinc oxide ZnO 59 multicrystalline silicon wafers 59 Photolithography 59 ethylene vinyl acetate 59 flexible monolithically integrated 59 manufactures silicon ingots 59 Gallium Arsenide 59 nitride 59 crystalline photovoltaic 59 Electrografting 59 CIGS solar cell 59 cadmium telluride CdTe thin 59 NOxOUT 59 upgraded metallurgical 59 nanofilm 59 photovoltaic wafers 59 silicon oxynitride 59 silicate glass 59 AlGaAs 59 crystalline silicon modules 59 Photovoltaic modules 59 multicrystalline solar 59 Aixtron MOCVD 59 poly Si 59 silicon photovoltaics 59 amorphous silicon 59 Micromorph R 59 electrodeposition 59 insulator wafers 59 Indium Tin Oxide 59 Deep Reactive Ion Etching 59 transparent conductive electrodes 59 CIGS photovoltaics 59 Micromorph ® 59 doped silicon 59 AlGaN GaN 59 ENN Solar 59 Amorphous silicon 59 Copper Indium Gallium diSelenide 59 crystalline silicon PV 59 amorphous silicon TFT 58 Manz Automation 58 aluminum nitride AlN 58 ceramic membranes 58 crystalline silicon wafers 58 polymer electrolyte 58 nano composites 58 nano imprint lithography 58 #nm #nm [002] 58 selective emitter 58 EDXRF 58 String Ribbon solar 58 metallisation 58 High Concentration Photovoltaic 58 indium gallium phosphide 58 crystalline PV 58 multicrystalline cells 58 photoelectrochemical 58 SOI CMOS 58 epiwafers 58 carbon nanotube CNT 58 battery anodes 58 Lithium Ion Li Ion 58 Zero Liquid Discharge 58 Mask Aligner 58 nanostructured silicon 58 c Si 58 Powerful debug 58 GaAs substrates 58 crystalline modules 58 silicide 58 Solid Oxide Fuel Cell 58 String Ribbon 58 amorphous silicon solar panels 58 Polycrystalline silicon 58 silicon photovoltaic PV 58 quantum dot solar 58 Photovoltaic Module 58 Czochralski 58 calcium fluoride 58 membrane PEM fuel 58 crystalline PV modules 58 titania 58 CIGS 58 cadmium telluride thin 58 titanium nitride 58 organic photovoltaics 58 Gallium Nitride GaN 58 k gate dielectrics 58 cadmium telluride semiconductor 58 Plasma Enhanced 58 AlGaN 58 laser scribing 58 Focused Ion Beam 58 SiON 58 photovoltaic module 58 purity silicon 58 electrochemical separations 58 Picogiga 58 Metrology System 57 nanopowders 57 Wafer Bonding 57 Applied SunFab 57 transparent conductive coatings 57 polysilicon wafers 57 Vertical Cavity Surface Emitting 57 multi crystalline silicon 57 monocrystalline silicon solar 57 Solar Modules 57 electrically insulating 57 Silicon Carbide 57 metallization pastes 57 Crystalline silicon 57 AG ES6 GY 57 Heterojunction 57 silane gas 57 metalorganic chemical vapor deposition 57 antireflection 57 polylactide 57 Plasmonic 57 epi wafers 57 poly crystalline 57 Thin Film Solar 57 Silicon Germanium 57 efficiency Gallium Arsenide 57 #nm CMOS [002] 57 solar PV module 57 bicomponent 57 INTRINSIC 57 GaN LEDs 57 photovoltaic PV module 57 silicon tetrachloride 57 gallium phosphide 57 amorphous silicon thin 57 Thermoelectric 57 vanadium oxide 57 UMG silicon 57 vapor deposition 57 Calyxo 57 crystalline silicon 57 nano crystalline 57 Resistive Random Access 57 CdTe Si 57 ceramics fracture proppants 57 mechanical polishing CMP 57 Hydrogen Generation 57 SiC substrates 57 SnO2 57 UV absorbance 57 Nanofiltration 57 temperature poly silicon 57 DSS#HP 57 #.#u 57 Silicon Nitride 57 polycrystalline 57 President Tetsuo Kuba 57 polycrystalline silicon solar 57 degumming 57 solution processable 57 cored wire 57 selenium CIGS 57 nickel hydroxide 57 reformed methanol 57 Vapor Phase 57 transparent conductive oxides 56 terrestrial concentrator 56 Carbon nanotube 56 solar laminates 56 Bitterfeld Wolfen 56 micromorph ® 56 heterostructures 56 electrocatalysts 56 Solar Cells 56 insulator SOI technology 56 Crystalline Silicon 56 transparent electrode 56 Centrotherm Photovoltaics 56 yttrium barium copper 56 Ansaldo Fuel Cells 56 HEMTs 56 high voltage BCDMOS 56 Chemical Mechanical Polishing 56 monocrystalline ingots 56 DEV DA TOMAR NEXT 56 InGaN 56 hollow fiber 56 biaxially oriented polypropylene 56 plasma etch 56 ALD Atomic 56 nanotube arrays 56 amorphous silicon cadmium telluride 56 III nitride 56 Planetary Reactor 56 monosilane 56 Aluminum Nitride 56 microstructured 56 defect densities 56 multilayer ceramic capacitors MLCC 56 zinc selenide 56 CIGS Solar 56 photovoltaics PV 56 Zinc Oxide 56 Photovoltaic Cells 56 CNT FED 56 carburizing 56 electro deposition 56 liquid crystal polymer 56 transistor HEMT 56 Q Cells SE QCE 56 Conversion Efficiency 56 monocrystalline silicon wafers 56 CVD reactors 56 Chemical Vapor Deposition CVD 56 ErSol 56 cells Covered Interconnect 56 copper metallization 56 thermoelectric generators 56 encapsulant 56 amorphous silicon photovoltaic PV 56 oxide nanowires 56 nitrogen doped 56 IGBT Insulated Gate 56 amorphous silicon PV 56 nanoimprinting 56 ZSW 56 wafer bonder 56 transparent electrodes 56 SOITEC 56 selective emitter cells 56 Single Wafer 56 manganite 56 SiO 2 56 ownership CoO 56 Ulvac 56 epitaxial 56 Thalheim Germany 56 absorption spectroscopy 56 Photonic Crystals 56 OTFT 56 PV Cells 56 encapsulants 56 SiC wafers 56 dilute nitride 56 aqueous dispersion 56 film photovoltaic TFPV 56 Solamet ® 55 SiGen 55 heterojunction bipolar transistor HBT 55 #μm thick [002] 55 cathode materials 55 Organic Chemical Vapor 55 nanopatterned 55 optical waveguides 55 passivating 55 SOI wafers 55 dye sensitized solar 55 micrometer thick 55 Nanometer 55 dielectric etch 55 multi crystalline wafers 55 laser annealing 55 TFPV 55 String Ribbon TM 55 monocrystalline 55 electro optic modulators 55 bismuth telluride 55 nano structured 55 electroless copper 55 ENLIGHT TM 55 bioelectronics 55 polycrystalline modules 55 polymer electrolyte membrane 55 photoresists 55 Sanyo HIT 55 ZnO nanowires 55 indium tin oxide ITO 55 monocrystalline ingots wafers 55 Polyimide 55 pentacene 55 nanocomposite material 55 Elpida #nm 55 nano tubes 55 epitaxial deposition 55 purifying silicon 55 vapor compression 55 Plasmonics 55 superlattice 55 para xylene 55 gallium indium phosphide 55 Ge substrates 55 IZM 55 Polymeric 55 Immersion Lithography 55 oxide nanoparticles 55 MEMS MOEMS 55 unsaturated polyester resin 55 SIMOX 55 Soitec produces 55 semiconductor nanowire 55 solar photovoltaic modules 55 solar photovoltaic PV modules 55 sputter deposition 55 Oxide Silicon 55 ultrafiltration UF 55 PECVD 55 CMP consumables 55 HTS wires 55 semiconductor optoelectronics 55 optical coatings 55 Hoku Membrane 55 GaAs substrate 55 Solar Cell 55 encapsulant sheets 55 zirconium oxide 55 microelectromechanical 55 barium titanate 55 backside metallization 55 gate dielectrics 55 cordierite 55 solar cells 55 CIGS thin film 55 nanofabricated 55 centrotherm 55 epitaxy 55 poly silicon 55 furnaceware 55 millisecond annealing 55 metal insulator 55 brightness light emitting 55 indium gallium arsenide InGaAs 55 Solamet 55 polycrystalline photovoltaic 55 AIX #G# 55 thermoplastic polyurethane TPU 55 Photoresist 55 silicon wafers utilizing 55 #μm thick [001] 55 transistor LCDs 55 Interferometric 55 thermopower 55 Solarworld AG SWV GY 55 DSSCs 55 patented crystalline silicon 55 Desorption 55 argon fluoride 55 Lithium Iron Phosphate 55 Heliatek 55 solar concentrators 55 engineered substrates 55 Tetratex 55 multicrystalline module 55 lithium niobate 55 Hydride 55 conductive polymer 55 nanowire arrays 54 thermoelectric generator 54 nanostructured solar 54 sapphire substrate 54 conductivities 54 Arima Optoelectronics 54 parabolic trough collectors 54 XsunX OTCBB XSNX 54 nano patterning 54 high purity polysilicon 54 polyvinylidene fluoride 54 CPV solar 54 photoconductive 54 pre preg 54 Moser Baer Photovoltaic 54 Thermal Oxidation 54 catalytic oxidation 54 IC substrates 54 K dielectrics 54 mask aligner 54 CIGS solar modules 54 PV Modules 54 gate dielectric 54 ThermaVolt 54 electroluminescence 54 Coatema 54 GaAs solar 54 ion implant 54 SOFCs 54 indium tin oxide 54 antireflective coating 54 Bipolar Transistor 54 low k dielectric 54 Flue Gas 54 flexible CIGS solar 54 polymethyl methacrylate PMMA 54 silicon epitaxial 54 Airborne Particle Sensor 54 polymer membrane 54 fuel cells SOFCs 54 Germanium 54 Hydrogen Production 54 polymeric membranes 54 VCSELs 54 epitaxial layer 54 CMOS RF CMOS 54 nanoporous 54 InGaP 54 #mm silicon wafers 54 #nm immersion lithography 54 PEDOT PSS 54 Flip Chip 54 mono crystalline PV 54 Oxyfuel 54 nm CMOS process 54 Scheuten Solar 54 β galactosidase 54 Lextar 54 UVTP 54 Italy Novamont SPA 54 CIGS modules 54 CMP slurry 54 efficiency monocrystalline silicon 54 leadframes 54 wafer thickness 54 cadmium zinc telluride 54 wafer dicing 54 MESFET 54 Deep Reactive Ion Etch 54 Uhde Inventa Fischer 54 CMOS fabrication 54 ultrapure 54 HyperSolar concentrator 54 metallic nanostructures 54 silicon germanium SiGe BiCMOS 54 Insulator SOI 54 String Ribbon ™ 54 Electrochemistry 54 chip resistors 54 excimer 54 #.# micron node 54 polymer electrolyte fuel 54 thermal oxidation 54 Nanoelectronic 54 LTPS TFT 54 germanium substrate 54 microelectronic components 54 SAXS 54 enzymatic hydrolysis 54 nickel silicide 54 nanoparticle inks 54 Concentrated Solar 54 concentrating photovoltaic 54 thinner wafers 54 silicon substrates 54 bioprocesses 54 Silicon carbide 54 superconductor wire 54 SiC Processing AG 54 GaN layers 54 ultrahigh purity 54 saccharification 54 Nanostructure 54 mass producible hydrogen 54 3Xnm 54 dielectrics 54 cylindrical modules 54 membrane electrode assembly 54 Sulfurcell 54 WVTR 54 Maxwell BOOSTCAP 54 crystalline silicon solar 54 acrylic esters 54 Solar Concentrator 54 Transparent Conductive Oxide TCO 54 crystalline silicon panels 54 Photo Voltaic 54 Topsoe 54 focused ion beam 54 Solar Wafer 54 performance solar encapsulants 54 ArF immersion lithography 54 polyacrylonitrile 54 crystallinity 54 Thin Film Photovoltaic 54 PURAC 54 asola 54 GaN transistor 54 manufactures integrated circuits 54 #.#um CMOS 54 Zener diodes 54 upon CIGS thin 54 Schkopau Germany 54 diffractive optical elements 54 Solar Module 53 Applied Endura 53 CIGSolar 53 multicrystalline ingots 53 acid hydrolysis 53 Silicon Feedstock 53 On Insulator SOI 53 LETG 53 3D Interconnect 53 WACKER POLYMERS 53 carbon nanomaterial 53 Aerosol Jet 53 SOI Silicon 53 GaN wafers 53 membrane distillation 53 concentrated photovoltaic CPV 53 proprietary nanoparticle 53 ultraviolet curable 53 Photovoltaic PV 53 electron mobility 53 pyrogenic silica 53 Nanolithography 53 aluminum gallium arsenide 53 carbon airgel 53 photoresist stripping 53 electrothermal 53 Group SolarTech 53 metallization 53 Sinosol AG 53 LTPS TFT LCD 53 k dielectric 53 CMOS silicon 53 backsheet component 53 chalcogenide glass 53 femtosecond lasers 53 solar concentrator 53 DuPont Teijin Films 53 Inventux 53 polycrystalline silicon poly Si 53 nanofibre 53 microbolometers 53 optical transceiver modules 53 transfection reagents 53 dielectric layer 53 Grätzel 53 CNano 53 concentrator photovoltaics 53 Tracit Technologies 53 UHMW PE 53 tin oxide 53 8Gb NAND 53 cryogenically cooled 53 CaliSolar 53 Solar Inverters 53 hermetic packaging 53 Jiangsu Shunda 53 NiSi 53 layer deposition ALD 53 laser micromachining 53 QMEMS 53 molten carbonate fuel 53 Solarion 53 dye sensitized cells 53 ECPR 53 nano electromechanical systems 53 deep ultraviolet DUV 53 molybdenum sulfide 53 APCVD 53 FinFET 53 phototransistors 53 AlGaInP 53 optically coupled 53 Schwarzheide Germany 53 C4NP 53 wide bandgap semiconductor 53 aluminum electrolytic capacitors 53 Silicon Oxide Nitride 53 Osram Opto 53 Aixtron SE 53 semiconducting material 53 patented Aerosol Jet 53 Electrode 53 silanes 53 photovoltaic PV modules 53 indium gallium phosphide InGaP 53 single axis trackers 53 Cymbet EnerChip 53 patterning technique 53 TFT backplanes 53 reactive ion 53 Silicon Carbide SiC 53 μm thick 53 photocatalysts 53 cell SOFC 53 porous membranes 53 Organic Photovoltaics 53 anode materials 53 SCHOTT Solar GmbH 53 nanoclay 53 Nanometrics standalone 53 concentrator photovoltaic 53 bipolar wafer 53 opto electrical 53 GaN transistors 53 electro optic plastics 53 monolithic microwave integrated 53 GaN wafer 53 ceramic crucibles 53 Solar Wafers 53 compounds CIGS thin 53 #,# butanediol BDO 53 Enecsys micro inverter 53 WACKER SILICONES 53 SunFab TM 53 Solar Inverter 53 Applied Centura 53 carbon nanotubes CNT 53 indium phosphide InP 53 polymer substrates 53 projected capacitive touch 53 SiC epitaxial wafers 53 Thermal Processing 53 UMC #nm 53 Building Integrated Photovoltaics 53 photoelectric conversion 53 molecular sieve 53 lithium titanate 53 PHEMT 53 AlN 53 microelectronic circuits 53 vibrational spectroscopy 53 Indium Phosphide 53 MaxEdge 53 Solarion AG 53 transistor LCD 53 micromachined 53 polycrystalline diamond 53 Tedlar films 53 optically transparent 53 nanosilicon 53 temperature superconducting 53 CMOS transistors 53 CRIUS II 52 low k dielectrics 52 Control LACC 52 indium nitride 52 ErSol Solar Energy 52 Applied Materials SunFab 52 PVD coating 52 hydrogen purifiers 52 nonpolar GaN 52 NexPower 52 polyvinylidene fluoride PVDF 52 Applied Baccini 52 mask aligners 52 polycrystalline PV 52 microfabrication 52 EOSINT M 52 MiaSole 52 monocrystalline cells 52 GaN LED 52 #.#um [001] 52 Sunfilm AG 52 dielectric layers 52 DPN ® 52 Nanophosphate 52 SWIR cameras 52 indium gallium nitride 52 Polycrystalline Silicon 52 Shape Memory 52 Thin Film Photovoltaics 52 multilayer ceramic 52 Netzsch 52 ArF 52 Capillary Electrophoresis 52 UV VIS 52 thermoelectric materials 52 String Ribbon ® 52 fused deposition 52 rechargeable lithium 52 OSTAR ® 52 centrotherm photovoltaics 52 nm SOI 52 Tessera Licenses 52 thermal lamination 52 SOFC stacks 52 X ray absorption spectroscopy 52 ceramic dielectric 52 METabolic EXplorer 52 titanium zirconium 52 STANGL 52 thermochemical conversion 52 physical vapor deposition 52 Hydrogen Generator 52 photovoltaic module encapsulation 52 conductive plastics 52 CIGS Thin Film 52 MOEMS 52 Photowatt France 52 transistor arrays 52 polysilicon wafer 52 sapphire wafers 52 PET tracers 52 intermetallic 52 InGaP HBT 52 C#F# [002] 52 2MW wind turbines 52 Si wafers 52 QD Laser 52 Ersol Solar Energy 52 Ube Industries Ltd. 52 LDK SOLAR 52 Fraunhofer Institut 52 microfiltration membrane 52 regenerable 52 film CIGS modules 52 fragile Gossamer Penguin 52 X ray microscopy 52 polyethylene PEN 52 micro optics 52 electroless 52 inherently flame retardant 52 polyamides 52 Tom Djokovich CEO 52 pHEMT 52 distributed MPPT 52 metallurgical silicon 52 fxP 52 NasdaqGM ESLR manufacturer 52 multijunction 52 cadmium selenide 52 Honda Soltec 52 VUV 52 Atotech 52 wet FGD 52 Silterra Malaysia Sdn 52 silicon etch 52 CMP slurries 52 MEMS NEMS 52 Plansee 52 polymer electrolyte membrane PEM 52 micro machining 52 Alchimer 52 DSS furnaces 52 inorganic semiconductors 52 CEEG 52 inorganic nanostructures 52 photovoltaic backsheets 52 Building Integrated Photovoltaic 52 nanobelts 52 GTAW 52 Suss MicroTec 52 Esatto Technology 52 superconducting wire 52 wafering 52 photovoltaic 52 BEOL 52 Cells CICs 52 Vistasolar 52 Electron Devices 52 linewidths 52 Microinverters 52 Perfectenergy 52 epiwafer 52 Photovoltaic Modules 52 parabolic trough solar 52 2G HTS wire 52 theproduction 52 thermoelectric cooling 52 #nm/#nm 52 microbatteries 52 quantum cascade lasers 52 nanofilms 52 molecular sieves 52 multilayer ceramic capacitors 52 air cooled condensers 52 metal matrix composites 52 SWCNT 52 aluminum electrolytic 52 gallium arsenide cells 52 silicon feedstock 52 Si TFT LCD 52 Nasdaq SPWRB 52 TiN 52 Indium phosphide 52 magnesium fluoride 52 organic electroluminescent 52 NorSun AS 52 bioconversion 52 Reverse Osmosis RO 52 multicrystalline ingots wafers 52 SOLARIS 52 pyroelectric 52 Tenova 52 junction amorphous silicon 52 AmpleSun 52 polyvinyl chloride resin 52 conductive polymers 52 BGA packaging 52 silicon nitride 52 DSSC 52 Membrane Contactors 52 cellulose ethers 52 silicon carbide substrates 52 semiconductor nanowires 52 ferrite core 52 FeRAM 52 SiO2 52 ion implanter 52 custom gallium arsenide 52 Electrofill 52 tunable diode laser 52 SkyTrough 52 nanocatalysts 52 Tracit Technologies Bernin 52 Yangguang Solar 52 SOI wafer 52 mask ROM 52 planar lightwave circuits 52 IGNIS 52 MoS2 52 Si substrate 52 nanopowder 52 NGK Insulators Ltd. 52 AMEX FSI 52 TFTs 51 polyetheretherketone PEEK 51 Gintech Energy 51 conductive pastes 51 vanadium redox batteries 51 transistor circuits 51 ingot wafer 51 etch deposition 51 EU PVSEC 51 photomultipliers 51 7N + high 51 glass substrates 51 photovoltaic laminates 51 electrolytic capacitors 51 Aixtron AG 51 PZT 51 electrochemical capacitors 51 Fraunhofer ISE 51 OLED Displays 51 Micro Inverter 51 photo voltaic PV 51 x ray detectors 51 Thin Film 51 MEMs 51 Novellus SABRE 51 First Solar FSLR.O 51 ENSL.OB 51 Thermo Plastic 51 #Wp 51 boron carbide 51 nanometric 51 Thin Film PV 51 pellicle 51 ® ethylene vinyl 51 #.#μ 51 nanostructured 51 concentrating photovoltaic CPV 51 Kuan Yin Taiwan 51 planarization 51 monocrystalline solar panels 51 Elkem Solar 51 SECIUM 51 #nm HKMG 51 Anantha Chandrakasan 51 cellulosic biomass feedstock 51 Solarmer 51 Aleo Solar AG 51 crystalline silicon wafer 51 #nm silicon 51 Solar Photovoltaics 51 ultrafiltration membranes 51 nanomesh 51 depolymerization 51 electrochemical deposition 51 Alzenau Germany 51 Polysilicon 51 amorphous silicon modules 51 Strained silicon