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(Click for frequent words.) 62 epitaxial layer 60 crystallinity 60 thermal conduction 60 Si substrate 59 conductivities 59 dual damascene 59 threshold voltages 58 linewidth 58 diffractive optical elements 58 electron scattering 58 bistability 57 pMOS 57 5μm 57 BJTs 57 nonlinearities 57 nMOS 57 interphase 57 RF transistors 56 bandgaps 56 AlGaN GaN 56 hyperfine 56 wafer thickness 56 transconductance 56 photocurrent 56 #.#μ 56 Figure 1b 56 MOS transistors 56 parasitic capacitance 56 electroluminescence EL 56 CMOS ICs 56 microcavity 56 parasitics 56 SiON 56 nonlinearity 55 inhomogeneity 55 neutron flux 55 #μm [002] 55 carrier mobilities 55 etalon 55 thickness uniformity 55 polariton 55 capacitances 55 5V CMOS 55 frictional heating 55 micrometer scale 55 superlattice 55 moldability 55 Fig. 2A 55 thermal gradients 55 epitaxial layers 55 gaussian 55 thorium uranium 55 magnetically coupled 55 photon energies 55 complexation 55 superior heat dissipation 55 SiGe C 55 CMOS fabrication 55 retained austenite 55 lasing threshold 55 helicity 55 axial radial 54 antireflective coatings 54 NGPs 54 photolithographic 54 Fig. 4a 54 radiative recombination 54 thermally activated 54 photon detection 54 hafnium oxide 54 gate electrode 54 thermal impedance 54 dielectric layer 54 heterojunction 54 nanometric 54 chromatograms 54 parasitic inductance 54 oxide thickness 54 TappingMode 54 etch selectivity 54 isostatic 54 fluid viscosity 54 cm ² 54 Vdd 54 supercontinuum generation 54 oscillation frequency 54 SOFC stacks 54 SWCNT 54 multibit 54 lithographic processes 54 planarization 54 dielectric layers 54 spectral density 54 pentacene 54 paramagnetic 54 AlGaAs 54 stereochemical 54 wavelength tunability 54 intramolecular 53 nitride semiconductor 53 microRNA molecule 53 martensitic 53 1μm 53 lattice mismatch 53 photomultiplier 53 subwavelength 53 4H SiC 53 accuracy repeatability 53 #um [002] 53 tetragonal 53 birefringence 53 mesoscopic 53 arbitrary waveforms 53 electron tunneling 53 linewidths 53 photoconductive 53 tensile strengths 53 nanoribbon 53 InAs 53 #ns [002] 53 FinFET 53 thermal conductivities 53 nonlinear optical 53 SWNT 53 MWNT 53 k dielectric 53 tensile modulus 53 Fig. 4b 53 AlN 53 heterogeneous catalysts 53 flowability 53 deuterated 53 magnetic permeability 53 melt viscosity 53 qubit quantum 53 leakage currents 53 nitride layer 53 absorption spectra 53 linear amplifiers 53 non linearities 53 reconfigurable logic 53 Buried Wordline technology 53 metallic nanostructures 53 oxide semiconductor 53 outcoupling 53 graphene layers 53 yttria 53 dipole moment 53 flyback converter 53 conformality 53 HEMT 53 capacitive coupling 53 elastic modulus 53 chromatogram 53 copper metallization 53 nematic 53 dispersive 53 dc voltage 53 detector arrays 53 calcium fluoride 53 inhomogeneities 53 thermo mechanical 53 heavy fermion 53 submicrometer 52 fluorescence emission 52 permittivity 52 Fig. 2a 52 gallium indium arsenide 52 defect densities 52 gelation 52 high-k/metal gate HKMG 52 ZnSe 52 breakdown voltages 52 linear interpolation 52 CMOS transistors 52 electroactive 52 GaN layer 52 deep sub micron 52 bandgap 52 HEMTs 52 chiral compounds 52 parasitic capacitances 52 Strained silicon 52 moduli 52 temperature coefficient 52 FinFETs 52 adiabatic 52 #nm laser [001] 52 electron bunches 52 QFNs 52 vesicle fusion 52 GaN HEMTs 52 dielectric constant 52 photon flux 52 lithographic techniques 52 inhomogeneous 52 photoionization 52 polymer fullerene 52 reflow profiles 52 #.#Hz 52 parametric yield 52 bandpass 52 inorganic semiconductors 52 ionic conductivity 52 Fig.2 52 MAX# integrates 52 intergranular 52 InGaN 52 PIN diode 52 buck converter 52 PCB layout 52 UVTP 52 SOI CMOS 52 pn junction 52 linearized 52 FPCs 52 nanocrystal 52 antiferromagnetic 52 MOS transistor 52 Fig. 2B 52 electroless copper 52 silicide 52 sapphire substrate 52 phonon scattering 52 dielectric constants 52 #.#um [001] 52 silicon waveguides 52 thermal dissipation 52 routability 52 bipolar transistors 52 compressive stress 52 thermodynamic equilibrium 52 photon counting 52 coplanarity 52 dissipative 52 FeRAM 52 antiparallel 52 epitaxy HVPE 52 linearisation 52 planar waveguide 52 Fig. 1D 52 APTIV film 52 k gate dielectric 52 annealing temperature 52 submicron 52 ceramic capacitor 52 mobilities 52 eutectic 52 low k dielectrics 52 piezoelectric properties 52 compressive strain 52 organic TFTs 52 polyhedral 52 silicon crystals 52 SiGe bipolar 52 Fig. 3A 52 isolated flyback 52 VCOs 51 planar lightwave circuits 51 K dielectrics 51 SAR ADC 51 CMOS silicon 51 QFN packaging 51 edge roughness LER 51 HRTEM 51 ownership CoO 51 CMOS circuits 51 1nm 51 SiC substrates 51 microstructured 51 magnetization reversal 51 3nm 51 quasiparticle 51 Supplementary Fig 51 ARPES 51 cordierite 51 nickel silicide 51 chalcogenide glass 51 friction coefficients 51 dephasing 51 sub picosecond 51 silicone encapsulation 51 heterojunctions 51 phototransistor 51 Fig. 1A 51 nm geometries 51 ohmic 51 warpage 51 patterning technique 51 silicon substrates 51 oscillators filters 51 covalent bond 51 micromirror 51 #.#V voltage 51 crystallites 51 hydrophobic interactions 51 photonic bandgap 51 nano imprint 51 amplifier module 51 diffraction grating 51 #ppm ° C 51 LSA#A 51 absorbance 51 rotary encoder 51 impedances 51 Fig. 1d 51 transistor circuits 51 dopants 51 Fig. 1a 51 reproducible measurements 51 fig. S2 51 microstrip 51 ZnO nanowire 51 dielectrics 51 dopant 51 photobleaching 51 magnon 51 5nm 51 JFET 51 rheological 51 electron transistor 51 stripline 51 polyimides 51 Schematic illustration 51 FD SOI 51 Si SiGe 51 tunable filters 51 temperature gradients 51 donor acceptor 51 silicon nanowire 51 bursty traffic 51 microcavities 51 ratiometric 51 selectivities 51 #.#μm [001] 51 weldability 51 nanoimprint 51 silicon waveguide 51 repeatable measurements 51 molecular orbitals 51 heterostructure 51 Figure 2a 51 Fig. 3a 51 SiO 2 51 Crystalline silicon 51 tighter tolerances 51 1dB 51 nonoverlapping 51 liquid crystalline 51 SOI substrate 51 quantum correlations 51 Schematic representation 51 martensite 51 wirebond 51 transistor arrays 51 #μm [001] 51 Fig. 3b 51 electron transistors 51 bipolar transistor 51 GaAs PHEMT 51 Fig. 3B 51 III nitride 51 ceramic composites 50 magneto optical 50 AlGaN 50 sidebands 50 3Xnm 50 vibrationally excited 50 Bragg grating 50 epitaxially 50 Fractional N 50 emission wavelength 50 quantization 50 SAXS 50 bistable 50 coplanar 50 #.#nm [002] 50 nanocrystalline 50 de noising 50 nanotubes nanowires 50 impurity atoms 50 nanosecond pulse 50 RFMD GaN 50 nanosize 50 Raman spectra 50 transistor amplifier 50 anomalous dispersion 50 absorption coefficient 50 JESD# [002] 50 perpendicular magnetic 50 photosystem II 50 bilayer 50 QCLs 50 laminate substrate 50 subpixel 50 enthalpy 50 photoconversion 50 demodulated 50 singulation 50 x ray optics 50 resonance frequency 50 vibrational modes 50 oligomer 50 CdS 50 8kHz 50 absorption spectroscopy 50 ZnO nanowires 50 unoptimized 50 absorber layer 50 ferrites 50 EUV mask 50 microstructural 50 coercivity 50 planar CMOS 50 colorimetry 50 nanopatterns 50 CoO 50 magnetisation 50 bismuth telluride 50 cuprate superconductors 50 input capacitance 50 InN 50 piezo ceramic 50 bilayer graphene 50 quantization noise 50 ab initio calculations 50 MESFET 50 Fig. 4B 50 photonic crystal 50 thermally induced 50 micrometre scale 50 chemiluminescence 50 quartz crystal oscillator 50 nanostructuring 50 flexural modulus 50 polyphase 50 output capacitance 50 transmittance 50 supercurrent 50 thermal decomposition 50 microtubes 50 planar 50 silicon oxynitride SiON 50 microreactors 50 UV wavelengths 50 photomultipliers 50 thermodynamic stability 50 vibrational spectroscopy 50 numerical aperture NA 50 circular dichroism 50 transimpedance 50 adsorbate 50 meV 50 Cu interconnects 50 laser resonator 50 cm -1 50 frequency transducers 50 photonic crystal fiber 50 Fig. 1B 50 foil resistor 50 lattice vibrations 50 oscillation amplitude 50 nanoparticle arrays 50 silicon nanocrystals 50 TGA# SM 50 electroactive polymer 50 formate 50 microchannel 50 dielectric breakdown 50 elastic moduli 50 CMOS logic 50 Figure 1a 50 carbon nanotube CNT 50 bilayers 50 pn junctions 50 equilibration 50 macroblock 50 computational complexity 50 coupling capacitance 50 voltage MOSFET 50 electrophoretic 50 quantize 50 z axis 50 tunable optical 50 supercritical fluid 50 semiconductor nanowires 50 predistortion 50 photorefractive 50 self assembled monolayer 50 GMSK 50 MaxBright 50 sigma delta 50 noise ratio SNR 50 viscoelastic properties 50 #nm lithography [001] 50 pore sizes 50 LDMOS devices 50 formants 50 NMR experiments 50 CCD detector 50 excitonic 49 Mosfets 49 nitride 49 epitaxial 49 topological defects 49 nm CMOS 49 surface plasmon 49 PEEK OPTIMA 49 dielectric 49 nanostructural 49 interatomic 49 mrad 49 Lumiramic phosphor technology 49 CMOS compatible 49 #Gbps serial 49 mosfet 49 thermomechanical 49 manganite 49 molecules adsorbed 49 valence band 49 photoconductor 49 thermal conductance 49 graphene transistor 49 AlN layer 49 Silicon Nitride 49 photodiode 49 corrugation 49 metallisation 49 absorber layers 49 epitaxial graphene 49 monodisperse 49 matrix 49 serialiser 49 electrically insulating 49 antimonide 49 van der Waals interactions 49 geometries shrink 49 RF baseband 49 photostability 49 NMOS 49 sine wave output 49 picosecond 49 processability 49 #.#dB [003] 49 tribological 49 reflowed 49 nanometer NAND 49 CCD imagers 49 Josephson junction 49 lattice parameter 49 amplicon 49 titania 49 unpatterned 49 QoR 49 oscillator frequency 49 Fig. 4A 49 kcal mol 49 passband 49 di dt 49 magnetic encoder 49 multichip 49 tetrahedral 49 fluorescence intensity 49 GNRs 49 solder reflow 49 Fig. 1C 49 chalcogenide 49 electroluminescence 49 stoichiometry 49 Fig. 1c 49 impedance matching 49 interfacial layer 49 undoped 49 netlists 49 nanotube sheets 49 parametrically 49 solder mask 49 electron proton 49 nanocluster 49 electron density 49 optical waveguides 49 elastic deformation 49 epitaxial structures 49 inelastic scattering 49 nonlinearly 49 actin filament 49 ceramic superconductors 49 8bit MCU 49 #nm lithography [002] 49 gate dielectrics 49 deep submicron CMOS 49 uniaxial 49 powder diffraction 49 photon absorption 49 polycrystalline 49 Josephson junctions 49 exfoliated graphene 49 chemical kinetics 49 isoelectric 49 #μm thick [002] 49 figs. 49 capacitive loading 49 ferrite core 49 ν 49 bypass capacitor 49 interleaving 49 darkfield 49 resonant frequencies 49 recrystallization 49 substrate 49 CdSe 49 temperature coefficients 49 ferro electric 49 rotational torque 49 frequency harmonics 49 μV 49 intracavity 49 solder bumps 49 photolysis 49 optical isolator 49 variable resistor 49 barium titanate 49 dispersion 49 dimensional tolerances 49 C0G 49 triplexer 49 Fig. 2C 49 polyaniline 49 coating thickness 49 PID controllers 49 birefringent 49 hydrolytic stability 49 austenitic stainless steels 49 reticles 49 intermodulation 49 3D LUTs 49 CVD diamond 49 wavetable 49 intermetallic 49 aligned carbon nanotubes 49 CAPEX OPEX 49 extracellular proteins 49 catalytically active 49 magnetic dipole 49 infrared microscopy 49 NiSi 49 epitaxial deposition 49 shrinking geometries 49 weld bead 49 Photolithography 49 extruded profiles 49 sub angstrom 49 converter topology 49 analog circuitry 49 cavity QED 49 SDS PAGE 49 aluminum nitride 49 #μs [002] 49 asynchrony 49 directivity 49 resistive element 49 silicon Si 49 anisotropic 49 electron spins 49 interdigitated 49 Ascentis Express 49 silicon interposer 49 Ti 4V 49 4mA 49 photoemission 49 piezo actuator 49 SAW oscillators 49 differential nonlinearity DNL 49 waviness 49 DfM 49 atomically smooth 49 ultrananocrystalline diamond 49 photoluminescence 48 homopolymer 48 nano patterning 48 LED printheads 48 frictional resistance 48 diffraction pattern 48 carbon nanotube arrays 48 polar modulation 48 reflow solder 48 reflows 48 beamsplitters 48 dewetting 48 capacitively coupled 48 table LUT 48 chipscale 48 solder bump 48 transmissivity 48 UV photons 48 silicon nitride 48 μW 48 k dielectrics 48 photodetector 48 hexamers 48 collimators 48 interrupt latency 48 Gaussian beam 48 datapath 48 nanowire arrays 48 switched capacitor 48 aluminum gallium nitride 48 fluorescence excitation 48 DPLL 48 crystalline lattice 48 Repeatability 48 #.#x#.#mm 48 carbon nanotube transistors 48 entangled qubits 48 zirconium oxide 48 modified sine wave 48 nanorod 48 Gallium nitride 48 opto couplers 48 tonal reproduction 48 silica spheres 48 Nernst 48 magnetostrictive 48 PWM pulse width modulation 48 interparticle 48 perturbation theory 48 eigenvalues 48 lowpass filter 48 toroid 48 interfacial 48 geometric distortion 48 rheology 48 cementite 48 relaxivity 48 geometries 48 solderable 48 halftone dots 48 SoC architectures 48 Figure 1A 48 resonance frequencies 48 imprint lithography 48 synchronous rectifier 48 mosfets 48 GaAs MESFET 48 depolarization 48 defectivity 48 magnesium ion 48 intrinsic jitter 48 optical resonator 48 ATP hydrolysis 48 honeycomb lattice 48 insulator SOI technology 48 tolerancing 48 PWM signal 48 multilayer ceramic 48 ceramic resonators 48 tunable wavelength 48 monolayer graphene 48 thermodynamically stable 48 BGA packages 48 NMR spectra 48 galvanic corrosion 48 magnetron sputtering 48 ferrite 48 solvation 48 picoseconds ps 48 LTPS TFT 48 organoleptic properties 48 polypeptide chain 48 extendibility 48 #:# LVDS 48 MPRs 48 catalytic reactions 48 highly conformal 48 Gallium arsenide 48 voltage CMOS 48 fast Fourier transform 48 geometric tolerances 48 molar ratio 48 Fig. 2b 48 optical encoder 48 damascene 48 bandpass filter 48 numerical aperture 48 electromigration 48 emission spectra 48 dependences 48 microfluidic channels 48 micropores 48 ε 48 hydrophobicity 48 5x #x 48 electromechanical coupling 48 InGaP 48 thermal coefficient 48 calorimeters 48 DC DC CONVERTERS 48 sealability 48 stator windings 48 diffusion coefficients 48 semiconducting nanowires 48 moisture absorption 48 Coulomb blockade 48 gold nanoclusters 48 fluence 48 #nm immersion 48 instrumentation amplifier 48 fs pulses 48 beam splitter 48 MEMS resonators 48 spatial coherence 48 synchronous MOSFET 48 transgene expression 48 nanostructured surfaces 48 emittance 48 ploidy 48 stereochemistry 48 #degC [002] 48 quadrature modulators 48 Dirac fermions 48 passive matrix 48 Sn Pb 48 AWB# 48 serdes 48 decoupling capacitor 48 synchronous rectification 48 InGaP HBT 48 shear modulus 48 spectroscopic analysis 48 microfabricated 48 compressibility 48 #nm #nm [005] 48 instrumentation amplifiers 48 TetraMAX ATPG 48 YBCO 48 indium gallium nitride InGaN 48 LVCMOS 48 dipolar 48 HBLEDs 48 kT 48 cellularity 48 DFT calculations 48 longitudinal axis 48 GaAs FET 48 opto electrical 48 rRNA 48 PWM controller 48 Carbon nanotube 48 ligand binding 48 biologically degradable 48 diffracted 48 electrocatalyst 48 multiscale 48 spatial temporal 48 bending radii 48 lipid bilayers 48 Schottky barrier 48 millivolt 48 tuner ICs 48 linearization 48 multiplexer demultiplexer 48 #x#mm package 48 lasing wavelength 48 burnup 48 #μF [001] 48 nonequilibrium 48 QFPs 48 photoelectron 48 Mosfet 48 osmotic pressure 48 DFB lasers 48 subsurface scattering 48 linearity 48 downconverter 48 colloidal particles 48 polymer nanocomposites 48 QFN packages 48 transmural 48 characteristic impedance 48 Alien Crosstalk 48 scintillators 48 voltage #.#V 48 QDs 48 Figure 3a 48 #GHz bandwidth 48 polylactide 48 boron atoms 48 PIN photodiode 48 OneNAND memory 47 redox reactions 47 4x oversampling 47 magnetization 47 locked loops PLLs 47 sise 47 electrochemically 47 Arria GX FPGAs 47 alpha blending 47 RF amplifiers 47 RF amplifier 47 X ray microscopy 47 hydroxide ions 47 nm immersion 47 micromechanics 47 Fig. 2D 47 springback 47 composite laminates 47 MOSFETS 47 OSNR 47 nanodots 47 brightfield 47 TVS diode 47 isotropic 47 adsorptive 47 electrons emitted 47 cadmium selenide 47 reflow temperatures 47 zener diodes 47 atomic lattice 47 immunomagnetic 47 anodic 47 tunable filter 47 covalent organic 47 2dB 47 output impedance 47 fig. S3 47 microwatt 47 tunability 47 electrostatics 47 decoherence 47 electron pairs 47 attenuation correction 47 nanoarrays 47 microvia 47 parallel kinematics 47 input impedance 47 nano imprint lithography 47 vibrational excitation 47 Photonic crystals 47 conductive coating 47 wavelet transform 47 #S proteasome 47 light fastness 47 GaAs FETs 47 #nm #nm [002] 47 conformational changes 47 helium ions 47 monolayers 47 PLL synthesizer 47 pearlite 47 parameterization 47 mammalian fatty acid 47 emitted photons 47 SAW filter 47 conduction cooling 47 sphericity 47 hysteresis loop 47 PIN diodes 47 phototransistors 47 DNase 47 2μm 47 serializer deserializer 47 coupling capacitors 47 μsec 47 multiphoton 47 voltage divider 47 vapor deposition 47 fermionic 47 Particulate Reactor TM 47 enzymatic degradation 47 Brillouin zone 47 #.#μm CMOS 47 chip optical interconnects 47 wettability 47 Fig.1 47 dielectric materials 47 nanotube arrays 47 Auger recombination 47 GaAs pHEMT 47 μm thick 47 layer graphene 47 semiconducting materials 47 twin screw extruder 47 capacitance 47 byte FIFO 47 dimensional nanostructures 47 color CMYK 47 nucleolar 47 parameter settings 47 cardiac SPECT 47 nanomesh 47 autocorrelation 47 optically transparent 47 nanomechanical 47 sonication 47 parameterisation 47 ferroelectricity 47 deterministic jitter 47 volumetric efficiency 47 manufacturability