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(Click for frequent words.) 73 Si substrate 71 microcavities 70 heterostructures 70 microcavity 70 InAs 69 dielectric layer 69 pMOS 69 manganite 69 MOS transistors 68 subwavelength 68 Josephson junctions 68 superlattice 68 gate electrode 68 antimonide 67 dielectric layers 67 AlGaN 67 silicon nanowire 67 epitaxial layer 67 optical waveguides 67 nanometric 67 silicide 67 SiO 2 67 dielectric materials 66 AlGaAs 66 nanofabricated 66 graphene layers 66 CMOS transistors 66 YBCO 66 AlN layer 66 pentacene 66 dopant 66 self assembled monolayer 66 photodetector 66 LiNbO3 66 passivation layer 66 AlGaN GaN 66 silicon Si 66 silicon waveguide 66 nanoporous 66 optical waveguide 65 ZnSe 65 toroid 65 semiconductor nanowires 65 indium gallium arsenide 65 dielectrics 65 tensile stress 65 insulating substrate 65 photonic bandgap 65 waveguides 65 bandgaps 65 ferroelectrics 65 eutectic 65 polariton 65 cadmium sulfide 65 ZnS 65 Carbon nanotube 64 Si SiGe 64 compressive stress 64 microfabricated 64 oxide layer 64 gate dielectrics 64 yttrium barium copper 64 silicon substrates 64 metallic nanostructures 64 nanochannels 64 photocurrent 64 atomic lattice 64 ZnO nanowires 64 heterojunction 64 lattice mismatch 64 zinc selenide 64 PIN diode 64 indium gallium arsenide InGaAs 64 indium gallium nitride InGaN 64 PIN photodiode 64 capacitive coupling 64 NiSi 64 InGaAs 64 micrometer scale 64 photonic crystal 64 metallisation 64 photodiode 64 ferromagnet 64 strontium titanate 64 CMOS circuits 64 epitaxial layers 64 nonlinear optical 64 intramolecular 64 nanotube arrays 64 thermally activated 64 nanostructured silicon 64 silicon nanocrystals 64 microstructured 64 nonmagnetic 64 photomultiplier tubes 64 chalcogenide 64 phototransistors 63 toroids 63 nMOS 63 GaN transistor 63 semiconducting material 63 nanocrystalline 63 ferromagnetic 63 nanofilm 63 low k dielectrics 63 superlens 63 indium phosphide InP 63 photoluminescence 63 III nitride 63 CMOS silicon 63 GaP 63 photonic circuits 63 crystallinity 63 k dielectric 63 optically transparent 63 1μm 63 PIN diodes 63 through silicon vias 63 bilayer graphene 63 PbS 63 SWCNT 63 indium phosphide 63 multilayers 63 bistability 63 uniaxial 63 SOI CMOS 63 indium gallium phosphide 63 ohmic 63 SiON 63 Schottky barrier 63 ultraviolet lasers 63 electrically insulating 63 GaN layer 63 solder bumps 63 superlattices 63 Fabry Perot 63 PEDOT 63 Laser VCSEL 63 laser optics 63 pn junction 63 parasitic capacitance 63 FinFET 63 photoconductive 63 microlens 63 nanodevice 63 crystal lattices 63 Schottky 63 submicron 63 electroluminescence EL 63 silicon photonic 63 indium arsenide 63 scintillator 63 Bragg grating 62 pn junctions 62 Indium Phosphide 62 polaritons 62 carbon nanotube transistors 62 CMOS circuitry 62 InSb 62 micromachined 62 #.#um [001] 62 organic TFTs 62 nanodots 62 nanocrystal 62 intermetallic 62 QDs 62 bilayer 62 silicon substrate 62 μm diameter 62 bismuth telluride 62 resistive element 62 Mott insulator 62 nanoribbon 62 silica spheres 62 gallium indium arsenide 62 semiconductive 62 coercivity 62 CdSe 62 conductive adhesives 62 5μm 62 inhomogeneity 62 lightwave 62 semiconductor nanocrystals 62 dipole moment 62 silicon oxynitride 62 barium titanate 62 photomultipliers 62 HEMTs 62 lithium niobate 62 aluminum nitride 62 electron tunneling 62 nanopillars 62 electrochemically 62 photodetectors 62 colloidal crystals 62 plasmon 62 exciton 62 nanoantenna 62 micromirror 62 conductive polymer 62 #nm laser [001] 62 diffraction grating 62 semiconducting nanowires 62 nitride layer 62 ZnO 61 micromechanical 61 multilayer ceramic 61 surface plasmons 61 dimensional electron 61 linearly polarized 61 voltage divider 61 carbon nanotube CNT 61 cuprate 61 nitride 61 surface plasmon 61 Gallium arsenide 61 GaN layers 61 copper interconnects 61 transparent conductive coatings 61 heterojunction bipolar transistor 61 #nm laser [002] 61 planar waveguide 61 microlenses 61 micro electromechanical 61 zener diodes 61 resonant cavity 61 sapphire substrate 61 collimators 61 microelectronic devices 61 GaN nanowires 61 photomultiplier 61 nanotubes nanowires 61 2μm 61 transistor amplifier 61 infrared laser beam 61 oxide semiconductor 61 conjugated polymer 61 nanomesh 61 MOS transistor 61 PEDOT PSS 61 toroidal 61 THz frequencies 61 inhomogeneities 61 MWNT 61 nitride semiconductor 61 dual damascene 61 graphene transistors 61 substrate 61 InGaN 61 sub picosecond 61 cadmium selenide 61 quantum mechanically 61 magnetostrictive 61 ferroelectric materials 61 silicon germanium SiGe 61 polymer substrate 61 antireflection coating 61 superconducting qubit 61 monochromator 61 terahertz frequencies 61 multijunction solar cells 61 piezoelectric transducer 61 electron bunches 61 leakage currents 61 MQW 61 stripline 61 gallium phosphide 61 amorphous silicon Si 61 RF transistors 61 compressive strain 61 silicon nitride 61 microwires 61 superconducting cables 61 SQUIDs 61 insulator wafers 61 micro machined 61 tin oxide 60 ferrites 60 nanocages 60 nitrides 60 DS DBR 60 PZT 60 transparent electrode 60 heterojunctions 60 excitons 60 mesoscopic 60 dielectric 60 hafnium oxide 60 diffracted 60 ellipsometry 60 silicon germanium 60 nano patterning 60 bandgap 60 eutectic alloy 60 manganese atoms 60 aluminum gallium nitride 60 analog circuitry 60 silicon waveguides 60 elastic deformation 60 reactive ion 60 atomically smooth 60 aluminum arsenide 60 GaSb 60 opto 60 microstrip 60 nanodroplets 60 cryogenically cooled 60 silicon atoms 60 lithographic processes 60 planar 60 dopants 60 nanomechanical 60 aluminum gallium arsenide 60 cementite 60 linewidths 60 coplanar 60 NWs 60 resonant tunneling 60 #.#μm [001] 60 phototransistor 60 Silicon Germanium 60 antireflection 60 polymer membrane 60 monolithically integrated 60 gallium nitride 60 wide bandgap 60 optomechanical 60 Photolithography 60 bipolar transistors 60 HEMT 60 Powerful debug 60 indium gallium phosphide InGaP 60 nanoelectromechanical 60 antiferromagnetic 60 magnetoresistive 60 Grätzel cells 60 leadless packages 60 demultiplexer 60 block copolymer 60 submicrometer 60 Epitaxial 60 perpendicular magnetic 60 ferrite core 60 UV lasers 60 GaN HEMTs 60 MAX# integrates 60 crystallites 60 HfSiON 60 nanotube transistor 60 waveguide 60 birefringence 60 self assembled monolayers 60 indium gallium 60 indium tin oxide ITO 60 collinear 60 microdevices 60 lamella 60 varactors 60 Semiconducting 60 titanium nitride 60 capacitively coupled 60 vertical cavity 60 optically coupled 60 K dielectrics 60 colloidal quantum dots 60 k dielectrics 60 molecules adsorbed 60 parasitic inductance 60 conduction electrons 60 photolithographic 60 planar lightwave circuits 60 donor acceptor 60 superlenses 60 #nm CMOS [002] 60 GaAs AlGaAs 60 crystalline lattice 60 optical modulators 60 k gate dielectrics 60 #nm VCSEL [001] 60 nanowire transistors 60 AlGaInP 60 Cu interconnects 60 micron thick 60 silicon 60 circuit MMIC 60 electron doped 60 epiwafer 60 parasitic capacitances 60 VCSEL 60 gallium indium phosphide 60 magnetically coupled 60 diffractive 60 polymer fibers 60 ceramic resonators 60 Josephson junction 59 micrometer sized 59 PEDOT nanotubes 59 GaN wafers 59 #μm [001] 59 photodiodes 59 EO polymer 59 isotropic 59 varistor 59 Gallium Nitride 59 plasma etching 59 HRTEM 59 GaAs substrates 59 topological insulators 59 TSMC #.#um 59 AlN 59 zinc oxide nanowires 59 HTS wires 59 ZnO nanowire 59 #μm [002] 59 gate dielectric 59 #.#μ 59 silicon oxide 59 tunable optical 59 fluorescent dye molecules 59 capacitances 59 MESFET 59 ferroelectric 59 carbon nanotube transistor 59 thermal conduction 59 ferroelectricity 59 VCSELs 59 topological insulator 59 paramagnetic 59 doped silicon 59 SWCNTs 59 femtosecond laser pulses 59 bipolar transistor 59 PMOS transistors 59 polyaniline 59 MWCNTs 59 microgel 59 feedthroughs 59 micron diameter 59 dimensional nanostructures 59 tunable filters 59 SiC substrates 59 #nm #nm [002] 59 μm thick 59 atomically thin 59 rubidium vapor 59 GaN transistors 59 nickel titanium alloy 59 nanomembranes 59 nanopillar 59 nickel silicide 59 graphene sheet 59 nanosized particles 59 absorption spectra 59 magnetization reversal 59 nanowire 59 Raman lasers 59 nanosized 59 triaxial 59 solder bump 59 avalanche photodiode 59 dispersive 59 Nd YAG lasers 59 Si substrates 59 GaAs substrate 59 multi walled nanotubes 59 supercurrent 59 electron mobility 59 quantum cascade 59 electrical conductance 59 nanowire arrays 59 photonic devices 59 nanoelectronic devices 59 directional couplers 59 5V CMOS 59 MWNTs 59 nanorod 59 sol gel 59 diodes 59 tensile strain 59 electronic excitations 59 wirewound 59 leadless package 59 nano fluidic 59 antiparallel 59 carbon nanotube arrays 59 single photon detectors 59 quantum dot 59 carbon nanotube electrodes 59 athermal 59 selenide 59 dielectric permittivity 59 semiconducting nanotubes 59 photonic crystal fiber 59 lattice vibrations 59 Si Ge 59 calcium fluoride 59 MLCCs 59 graphene nanoribbons 59 quantum cascade lasers QCLs 59 semiconducting materials 59 piezoelectric crystals 59 mesoporous 59 heavy fermion 59 Mosfets 59 alkene 59 FinFETs 59 antifuse 59 PEEK OPTIMA 59 nucleation layer 59 DEV DA TOMAR NEXT 59 microcrystalline 59 semiconducting 59 lanthanum aluminate 59 thermal conductivities 59 magnetoresistance 59 micro optics 59 detector arrays 59 transparent conductive 59 threshold voltages 59 polydimethylsiloxane PDMS 58 biaxial 58 reentrant 58 anodic 58 BJTs 58 magnetron sputtering 58 superparamagnetic 58 halide 58 sensor actuator 58 metallic interconnects 58 anisotropic 58 electret 58 InGaP 58 transistor arrays 58 Raman spectra 58 scanning microscopy 58 amplifiers EDFAs 58 nematic 58 porous silicon 58 nonconducting 58 epitaxially grown 58 conjugated polymers 58 iCoupler 58 SWNT 58 IGBT Insulated Gate 58 opto electrical 58 graphite oxide 58 hollow cylinders 58 piezoelectric ceramic 58 erbium doped fiber 58 MEMS resonators 58 JFET 58 covalent bond 58 electron scattering 58 SPDT switch 58 X7R 58 chalcogenide glass 58 breakdown voltages 58 5kV 58 spintronic device 58 ferro electric 58 emitting lasers 58 interdigitated 58 QMEMS 58 photobleaching 58 QCLs 58 NMOS 58 protein adsorption 58 #.#x#.#mm 58 conductive epoxy 58 ferromagnetic materials 58 cryostat 58 epitaxial deposition 58 polymer matrix 58 fluorescence quenching 58 thermo mechanical 58 microfluidic channels 58 piezoelectric sensors 58 nonpolar GaN 58 SOI substrates 58 piezoelectric crystal 58 absorption spectroscopy 58 #.#uF 58 silica nanoparticles 58 dopant atoms 58 serialiser 58 reed switches 58 electrospinning technique 58 #.#μm CMOS process 58 input impedance 58 optically pumped 58 cadmium selenium 58 epitaxial graphene 58 Schematic representation 58 ultraviolet wavelength 58 #um [002] 58 excitonic 58 pyroelectric 58 DFT calculations 58 Strained silicon 58 dipoles 58 polymer nanofibers 58 dipole antenna 58 antiferromagnets 58 GaAs FET 58 thermally induced 58 conductive coating 58 microfluidic chips 58 titanium carbide 58 copper metallization 58 CyberDisplay #K 58 chalcogenides 58 Follow Vishay 58 #:# multiplexer 58 phosphorus atom 58 SAW oscillators 58 nanoelectromechanical systems 58 4H SiC 58 nanosheets 58 laser resonator 58 optofluidic 58 indium gallium nitride 58 polyhedral 58 TFTs 58 walled carbon nanotube 58 silicon etch 58 nanometer scale 58 LTPS TFT 58 nanobelts 58 Photonic crystals 58 thyristor 58 feedthrough 58 weakly interacting 58 depolarized 58 quantum dot lasers 58 variable resistor 58 Germanium 58 monolayer graphene 58 CMOS fabrication 58 UV photons 58 quantum oscillations 58 perovskite 58 DMOS 58 Aâ 58 cobalt atoms 58 dewetting 58 transistor circuits 58 silicate glass 58 electroless copper 58 #um [001] 58 quantum metrology 58 frequency transducers 58 terahertz waves 58 THz radiation 58 HgCdTe 58 photoemission 58 dielectric constant 58 absorber layer 58 Fig. 1a 58 defect densities 58 GaN LEDs 58 piezoresistive 58 TFT substrate 58 layer graphene 58 epiwafers 58 electron transistor 58 metallic ions 58 planarization 58 steric 58 nanopatterns 58 bistable 58 PIN photodiodes 58 quasicrystal 58 Cadmium Telluride CdTe 58 optical resonator 58 nanosilicon 58 undoped 58 interparticle 58 ultrasonic transducers 58 polymer membranes 58 monolayers 58 outcoupling 58 gold nanorods 58 transmissivity 58 gallium arsenide 58 mount inductors 58 nano crystals 58 dipolar 58 multiwalled carbon nanotubes 58 wafer dicing 58 piezo actuators 57 GaAs pHEMT 57 diffracting 57 powder diffraction 57 piezoelectric actuator 57 anode cathode 57 laser excitation 57 carbon nanostructures 57 electrospray 57 boron atoms 57 nanocomposite material 57 magnetisation 57 gallium selenide 57 solderable 57 quasiparticle 57 electrically conductive 57 nanolayers 57 ionic conductivity 57 epitaxial wafers 57 nanocrystalline silicon 57 X ray pulses 57 nanocrystals 57 diode arrays 57 Vertical Cavity Surface Emitting 57 #nm wavelength [001] 57 ultrasonic vibrations 57 dielectric etch 57 Nova NanoSEM 57 metal insulator 57 microelectrode array 57 backplane connectors 57 mux demux 57 antireflective coatings 57 photon counting 57 RF LDMOS 57 graphene transistor 57 polysiloxane 57 linear amplifiers 57 leadless 57 conductive adhesive 57 nanomembrane 57 ferrite 57 polymer electrolyte 57 SWNTs 57 P3HT 57 x ray optics 57 film transistors TFTs 57 OP# [003] 57 piezoelectric properties 57 interatomic 57 zinc oxide ZnO 57 quantum cascade lasers 57 nonlinearity 57 inductive proximity 57 epi wafers 57 TSVs 57 epitaxial 57 RF transmitter 57 low k dielectric 57 effect transistor FET 57 metallic nanoparticles 57 magnesium ion 57 nanocubes 57 spherical particles 57 electrically conducting 57 Fiber Bragg Grating 57 #.#nm [002] 57 evanescent waves 57 honeycomb structure 57 ionized oxygen 57 femtosecond lasers 57 anisotropy 57 reconfigurable logic 57 InN 57 emitting lasers VCSELs 57 CdS 57 ceramic capacitor 57 #.#V CMOS 57 fluorescence emission 57 micrometre scale 57 YAG lasers 57 inelastic scattering 57 monolithic CMOS 57 VUV 57 integrated passives 57 mercury cadmium telluride 57 semiconducting carbon nanotubes 57 interferometric 57 passivated 57 emission spectra 57 nanometers billionths 57 niobium titanium 57 macroporous 57 nanochannel 57 nanopatterned 57 demagnetization 57 impedances 57 ultradense 57 palladium Pd 57 Gallium Arsenide GaAs 57 hollow nanospheres 57 hermetic packaging 57 NdFeB 57 optical interconnect 57 piezo resistive 57 nanofilms 57 etalon 57 optical isolator 57 HfO2 57 solder mask 57 terahertz radiation 57 optical lattices 57 sensor arrays 57 SOI wafer 57 electromagnetic shielding 57 femtosecond pulses 57 magnetron 57 C0G 57 3mm x 57 cm ² 57 photocouplers 57 electro magnetic interference 57 downconverter 57 lamellar 57 martensite 57 trans impedance 57 TOSAs 57 heterodyne 57 semiconducting properties 57 microdevice 57 SOI silicon 57 THz waves 57 nanomotors 57 nanomotor 57 diodes LEDs 57 mosfet 57 NMR spectra 57 Indium phosphide 57 photoelectron spectroscopy 57 #nm lithography [001] 57 MEMs 57 silicon monoxide 57 transmural 57 stray capacitance 57 ferromagnets 57 optical coatings 57 zirconium oxide 57 impedance measurements 57 metamaterial structures 57 cadmium chloride 57 polymeric 57 RF MEMS switches 57 Michelson interferometer 57 silicon modulators 57 epitaxy 57 superconductive 57 indium tin oxide 57 cm -1 57 nanoscale 57 monolithic microwave integrated 57 macroscale 57 Tunable 57 rectifier diode 57 photocatalysts 57 electron optics 57 LSA#A 57 microvias 57 Insulator SOI 57 micromachines 57 micromirrors 57 hydrophobic interactions 57 coupling capacitors 57 photonic crystal waveguide 57 JENOPTIK GmbH 57 quantum dots 57 Serdes 57 zener diode 57 optical 57 diffractive optical elements 57 bypass capacitor 57 velocity dispersion 57 magnetic permeability 57 nanosecond pulse 57 polarized electrons 57 bypass diodes 57 single photon detector 57 carbon nanotube 57 microlasers 57 scanning tunneling microscopy 57 topological defects 57 electrochemical sensors 57 deformable mirror 57 Interferometric 57 quantum dots QDs 57 microelectronic components 57 nanoscale patterning 57 microchannel plate 57 ultrathin layer 57 nanoindentation 57 piezoelectric materials 57 transistor HEMT 57 wavelength ultraviolet 57 imprint lithography 57 circular dichroism 57 tunable RF 57 electrochemical sensor 57 phosphor coated 57 micro fluidic 57 nanodiamond 57 RRAM 57 bismuth ferrite 57 amorphous silica 57 ferromagnetism 57 Fig. 4b 57 passivation 57 GPa 57 membrane pores 57 germanium silicon 57 DiCon 57 Plasmonic 56 multiferroic 56 Ytterbium 56 photon flux 56 electrochemical 56 microelectromechanical 56 photon energies 56 multimode fibers 56 colloidal particles 56 manganese oxide 56 patterning technique 56 emission wavelength 56 insulating layers 56 microfluidic chip 56 finFETs 56 gallium indium 56 Bragg reflector 56 RF amplifier 56 Rydberg atom 56 vesicle fusion 56 Nanowires 56 anneal 56 rotaxanes 56 interfacial 56 1kV 56 differential impedance 56 infrared emitters 56 opto mechanical 56 crystal oscillator 56 micrometre 56 microswitches 56 light emitting transistor 56 opto electronic 56 galvanometer 56 thermal decomposition 56 pyramidal neurons 56 post perovskite 56 microfabrication techniques 56 biological molecules 56 microchannels 56 RFMD GaN 56 electron transistors 56 quantum coherence 56 cadmium sulphide 56 SOI substrate 56 carbon nanotubes CNT 56 underfill 56 fluorogenic 56 #nm immersion lithography 56 liquid crystal polymer 56 epitaxially 56 avalanche photodiodes 56 interferometers 56 directional coupler 56 #mm# [002] 56 chipscale 56 graphitic carbon 56 transimpedance amplifier 56 Gallium Arsenide 56 thermal impedance 56 gate transistors 56 gelation 56 silicon Mach Zehnder 56 epitaxial structures 56 spherical particle 56 linewidth 56 relaxivity 56 nanostructured surfaces 56 Magnetic nanoparticles 56 polyacrylonitrile 56 micromechanics 56 intergranular 56 microbatteries 56 sq. mm 56 #.# micron node 56 correlated electron 56 sulfur atom 56 capacitors inductors 56 parylene 56 nanoscopic 56 nanotubes 56 biocompatible polymers 56 #.#μm CMOS 56 nanostructures 56 scanning electron 56 micropores 56 compressive stresses 56 transceiver modules 56 lightwaves 56 aluminum electrolytic 56 gold nanorod