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(Click for frequent words.) 61 lithography 56 imprint lithography 54 substrates 54 photolithography 53 metallization 53 substrate 53 anisotropic 53 planar 52 nanocrystal 52 nanometer scale 52 FinFET 52 epitaxy 52 photolithographic 52 helical structure 52 maskless 51 lithographic 51 Patterning 51 geometries 51 e beam lithography 51 photoreceptor 51 optical lithography 51 photonic crystal 51 morphogenesis 51 nanostructure 50 dual damascene 50 pulsed laser deposition 50 birefringence 50 planarization 50 nanostructures 50 microcontact printing 50 defectivity 50 dopant atoms 50 EUV mask 50 nanoarrays 50 SWNT 50 singulation 50 MOS transistors 50 imprinting 49 EUV masks 49 optical waveguides 49 surface functionalization 49 reticles 49 nanopatterns 49 nanopillar 49 pMOS 49 roughening 49 passivation 49 electrophoretic 49 photoresist 49 photobleaching 49 microcavities 49 nanostructured surfaces 49 dielectric 49 bandgaps 49 nanowire transistors 49 chromatin structure 49 silicon nanowire 49 microstructural 49 quantum dot 49 III nitride 49 low k dielectric 49 nanoscale 49 EUV resists 49 morphology 49 dimensional nanostructures 49 quantum dots 49 SiON 49 gate dielectrics 49 silica spheres 49 magnetization reversal 49 MEMS resonators 48 SWCNT 48 nanoimprinting 48 damascene 48 nanoimprint 48 sol gel 48 serigraphy 48 semiconducting nanowires 48 heterostructure 48 transistor 48 nanoantenna 48 lithography etching 48 epitaxial layer 48 immersion lithography 48 microlasers 48 stranded RNAs 48 electron tunneling 48 metallisation 48 waviness 48 membrane fusion 48 SOI CMOS 48 microscopy techniques 48 dielectric layers 48 carbon nanotube transistors 48 micromachined 48 nanopillars 48 electron scattering 48 birefringent 48 functionalization 48 nematic 48 semiconducting 48 lithographic techniques 48 rhombic 48 cone photoreceptors 48 quasicrystalline 48 FinFETs 47 MQW 47 nickel silicide 47 nanowire 47 nanopatterned 47 sputter deposition 47 flexible substrates 47 plasmonics 47 Photolithography 47 biomineralization 47 metallic inks 47 myelination 47 conformational changes 47 light emitting 47 barium titanate 47 planarity 47 nanocrystalline 47 nitride 47 microscale 47 nonlinear optical 47 etching 47 silicon nitride 47 inhomogeneity 47 nanomechanical 47 Si substrate 47 lamellar 47 nanomagnets 47 submicron 47 microstructured 47 nanodevice 47 Carbon nanotube 47 nanolithography 47 photodiode 47 Strained silicon 47 Lithography 47 collagenous 47 through silicon vias 47 lucidum 47 morphogenetic 47 litho 47 nano scale 47 cortical neurons 47 micromachining 47 nanoelectronic devices 47 solder bump 47 ferroelectricity 47 photorefractive 47 semiconductor quantum dots 47 k gate dielectric 47 heterojunctions 47 diffraction pattern 47 vibrational spectroscopy 47 photodetector 47 submicrometer 47 halftone 47 nanoscale structures 47 lithographic processes 47 nano imprint 47 anisotropy 47 gate electrode 47 surface texturing 47 plasticity 47 crystallographic 47 carbon nanotube 47 photomasks 46 ferroelectrics 46 lattice mismatch 46 macroscale 46 atomically smooth 46 micromechanics 46 superlenses 46 quasicrystals 46 nanodots 46 overmolding 46 thermal conduction 46 polycrystalline 46 chromosome segregation 46 microfabrication 46 quasicrystal 46 faceting 46 hydrophobicity 46 conjugated polymers 46 #nm node [001] 46 linewidth 46 microfabricated 46 optical aberrations 46 combinatorial synthesis 46 gastrulation 46 conformal 46 lithographic patterning 46 plasmon 46 nanopatterning 46 RRAM 46 EUV lithography 46 silicon CMOS 46 reticle enhancement 46 interfacial 46 indium phosphide InP 46 walled carbon nanotube 46 TiN 46 micro machining 46 nanostructuring 46 adhesion 46 glycan 46 nanometric 46 layer graphene 46 semiconducting materials 46 coiled coil 46 edge roughness LER 46 polymer nanocomposites 46 spectroscopic methods 46 supramolecular 46 nanoporous 46 #nm immersion 46 optogenetics 46 bilayer graphene 46 CMOS transistors 46 bandgap 46 neuronal migration 46 nucleation 46 gold nanostars 46 ferroelectric 46 ciliated 46 photopolymers 46 transistor circuits 46 photonic bandgap 46 microfluidic channels 46 morphological 46 mammalian sperm 46 CMOS logic 46 multilayers 46 computational lithography 46 gamete formation 46 microRNA molecule 46 #nm/#nm 46 epitaxial graphene 46 luminescence 46 X ray diffraction microscopy 46 evanescent wave 46 fluorescent probes 45 coercivity 45 CMOS circuits 45 absorber layer 45 linewidths 45 silkworm silk 45 block copolymer 45 aluminum nitride 45 deep sub micron 45 texturing 45 extreme ultraviolet lithography 45 nm node 45 superlattices 45 SiO 2 45 deconvolution 45 heterojunction 45 dielectrics 45 crystallinity 45 photon fluorescence 45 microstructures 45 protein adsorption 45 nano patterning 45 gold nanoclusters 45 nanotube 45 MT1 MMP 45 CPEB 45 nano crystals 45 outcoupling 45 dorsolateral 45 halftone dots 45 k dielectric 45 epitaxial 45 UNCD 45 nanostructured materials 45 morphologies 45 Fig. 1A 45 NiSi 45 photoactivation 45 nanofabrication 45 #nm lithography [001] 45 deep submicron 45 manganite 45 mesoscopic 45 pentacene 45 VCSEL 45 Fig. 4a 45 amyloid deposition 45 ZnO nanowires 45 polymer nanofibers 45 transcriptional regulation 45 collagraph 45 stem cell differentiation 45 rheological 45 vertebrate embryos 45 silicide 45 polariton 45 nanochannels 45 X. laevis 45 graphene 45 3Xnm 45 oligomer 45 bistability 45 cortical 45 #nm nodes 45 P cadherin 45 supramolecular structures 45 semiconductor nanostructures 45 subwavelength 45 ferro electric 45 microstructure 45 nanoribbon 45 low k dielectrics 45 nanoscopic 45 confocal microscopy 45 nanophotonic 45 coplanar 45 nanofilm 45 biominerals 45 BEOL 45 metallic alloys 45 advanced leadframe 45 lamination 45 backside metallization 45 osteoblast differentiation 45 optically transparent 45 microelectronic devices 45 photomask 45 dopants 45 #nm #nm [005] 45 nano imprint lithography 45 exfoliated graphene 45 CdSe 45 IGF2 45 barium ferrite 45 mechanical polishing CMP 45 5μm 45 annealing 45 haplotyping 45 organogenesis 45 biological molecules 45 nanotubes nanowires 45 MOS transistor 45 optical waveguide 45 photoluminescence 45 cuticular 44 ferromagnet 44 multilayer 44 vascularization 44 nanoparticle arrays 44 nanolayers 44 ultrasonic welding 44 TSVs 44 self assembled monolayer 44 nanowire arrays 44 optical microscopy 44 k dielectrics 44 k1 44 axon guidance 44 epithelial tissue 44 mesoderm 44 hexamers 44 ultraviolet lasers 44 strontium titanate 44 situ hybridisation 44 neural 44 nm lithography 44 antireflection 44 CMOS fabrication 44 InAs 44 spectral imaging 44 interatomic 44 zirconium nitride 44 electron spins 44 optomechanical 44 UVTP 44 diffractive optical elements 44 ADAMTS# 44 vias 44 macroscopic 44 defect densities 44 lithographically 44 diffraction 44 interferometry 44 geometric 44 synapse formation 44 superlattice 44 electron mobility 44 indium tin oxide ITO 44 epigenetic regulation 44 Photonic crystals 44 maskless lithography 44 high-k/metal gate 44 nano coatings 44 intaglio printing 44 antiparallel 44 wirebond 44 correction OPC 44 Shh signaling 44 X ray microscopy 44 FGF signaling 44 smaller geometries 44 antiferromagnets 44 processive 44 pellicle 44 decoherence 44 SOI substrate 44 Fig. 1a 44 donor acceptor 44 circular dichroism 44 radical polymerization 44 electron spectroscopy 44 cleavage furrow 44 nanoribbons 44 solder bumps 44 chromophore 44 photochemical 44 diffraction grating 44 micrometre scale 44 technique 44 nanowires 44 carbon nanotubes 44 Cu interconnects 44 cryptochromes 44 plasmonic 44 optically 44 silicon substrates 44 chalcogenide 44 isotropic 44 functionalizing 44 lithium niobate 44 LiNbO3 44 nm SRAM 44 nanohole 44 parameter estimation 44 protein filaments 44 tetrahedral 44 chemical reactivity 44 membrane permeability 44 micrographs 44 microfluidic chip 44 AlGaN 44 neuroanatomical 44 photonic devices 44 magnetization 44 intramolecular 44 ligand receptor 44 alternative splicing 44 resonators 44 ECPR 44 Grätzel cells 44 metallic nanostructures 44 anodic 44 Semiconducting 44 transduction 44 subsurface scattering 44 phenotypic variation 44 DFM DFY 44 morphometrics 44 metamaterial structures 44 scanning microscopy 44 Dicer 44 micromirrors 44 optical interconnections 44 EUVL 44 photopolymer 44 spectroscopic techniques 44 vapor deposition 44 fluorescent microscopy 44 immunofluorescence 44 monolayers 44 nitride semiconductor 44 extruded profiles 44 micrometer scale 44 CMOS compatible 44 suberin 44 cryo electron microscopy 44 microcavity 44 plasma etching 44 nanoscale dimensions 44 semiconducting properties 44 forelimb 44 multiscale 44 warpage 44 extreme ultra violet 44 heterogeneous catalysts 44 chlorosome 44 myosin VI 44 spider silks 44 photon microscopy 44 morphological evolution 44 ultrafast pulses 44 stranded RNA dsRNA 44 cyanotype 44 insulating substrate 44 dielectric constant 44 X ray scattering 44 monodisperse 44 electron transistors 44 nanoelectromechanical systems 44 nanoscale patterning 44 pn junctions 44 conductance 44 spatiotemporal 44 nMOS 44 nm nodes 44 sequencing 43 tessellations 43 crystalline semiconductors 43 stochastic resonance 43 dedifferentiation 43 micro vias 43 wafer bonding 43 heterochromatic 43 optical coatings 43 nanocluster 43 diffractive 43 piezo ceramic 43 neural crest cells 43 geometry 43 abstract geometric 43 nanostructural 43 rhodopsin 43 AlGaN GaN 43 ZnSe 43 #nm laser [002] 43 solder bumping 43 5V CMOS 43 vectorial 43 Notch signaling pathway 43 titanium carbide 43 planar CMOS 43 conformational 43 hafnium oxide 43 3bpc 43 micrograph 43 nanodiamond 43 solder paste printing 43 fluorescence intensity 43 gene amplification 43 Supplementary Methods 43 dimorphic 43 nanofabrication techniques 43 ChIP chip 43 electron microscopy 43 bilayers 43 nonequilibrium 43 aggrecan 43 cantilevers 43 spectroscopic imaging 43 silicon waveguides 43 thermochromic 43 UV NIL 43 mammalian neurons 43 perpendicular magnetic 43 striation 43 #.#um [001] 43 mammalian brains 43 photoconversion 43 bistable 43 surface roughness 43 epitaxial deposition 43 microcircuitry 43 manufacturability 43 JAK STAT 43 EBDW 43 uniformity CDU 43 nickel titanium alloy 43 nanosize 43 #μm [002] 43 micromirror 43 crosslinking 43 organic photovoltaics OPV 43 HAMR 43 pigmentation 43 microdevices 43 Fig. 2B 43 photoreceptor cell 43 subcellular structures 43 BMP signaling 43 InP 43 laminations 43 anneal 43 tensile stress 43 interstitial spaces 43 waveguides 43 condyles 43 aligned carbon nanotubes 43 SMS NIL 43 lateralization 43 nanoindentation 43 bismuth telluride 43 fabricate nanoscale 43 K dielectrics 43 transcriptional repressor 43 synaptic transmission 43 Fractional N 43 #μm [001] 43 retrotransposon 43 tonal gradation 43 diffracted 43 photostability 43 spectral reflectance 43 DNA helix 43 ipRGCs 43 Fig. 2a 43 Wnts 43 electrospinning 43 fibrillar 43 nm immersion 43 electrodeposition 43 polymer fibers 43 chromatid 43 corrugation 43 PMOS transistors 43 protein conformations 43 Schottky 43 nm 43 z axis 43 Bragg grating 43 ubiquitination 43 aCGH 43 serdes 43 cytoskeletal 43 echogenic 43 electronic excitations 43 morphogens 43 indium gallium nitride InGaN 43 inorganic semiconductors 43 '# patent relates 43 achromatic 43 striated muscle 43 thinner wafers 43 electroless 43 colloidal crystals 43 chine colle 43 insulator wafers 43 synthesis 43 uniformities 43 photonic crystals 43 ferromagnetic 43 colocalization 43 deformable mirrors 43 fusiform 43 tunability 43 nanomagnetic 43 Josephson junctions 43 micrometer thick 43 Fig. 3A 43 surface plasmon resonance 43 silicon nanocrystals 43 silicon germanium 43 stencil 43 nutrient uptake 43 computational simulations 43 eukaryotic cell 43 fibril 43 electrostatics 43 patterning technique 43 unpatterned 43 multicolor 43 oscillatory 43 nonlinear dynamics 43 nanotube bundles 43 IRS1 43 linearization 43 surface plasmon 43 geometrical patterns 43 n cofilin 43 geometrical shapes 43 hexamer 43 Agilent SurePrint 43 Sanger sequencing 43 retinal neurons 43 nonlinearity 43 microlenses 43 electron pairs 43 #nm laser [001] 43 intergranular 43 ellipsometry 43 InGaN 43 biomolecule 43 dopant 43 protein complexes 43 miRNA expression 43 ankyrin repeats 43 oxide thickness 43 fluorophores 43 micro fluidic 43 topological defects 43 Fig. 2b 43 printability 43 semiconductor nanocrystals 43 mesenchyme 43 vernalization 43 PZT 43 Fig. 1C 43 optical metamaterials 43 subretinal 43 neovascularization 43 metal oxide 43 magnesium ion 43 hydrophobic surfaces 43 laterality 43 thermally activated 43 combinatorial libraries 43 Nanoimprint lithography 43 fibril formation 43 photon detectors 43 wafer thickness 43 Schematic representation 43 nano imprinting 43 redox reactions 43 fluorescence spectroscopy 43 crystalline 43 fluorescent dye molecules 43 nonlinear optics 43 transistor arrays 43 collimating 42 paramagnetic 42 topological 42 phytochrome 42 interposer 42 bacterial flagella 42 filopodia 42 aperiodic 42 indium arsenide 42 geometrical 42 lateralized 42 teleost 42 biaxial 42 hybridization 42 clock gating 42 silicon Mach Zehnder 42 nanotubes 42 AlN 42 opsins 42 crosshatching 42 meiotic recombination 42 neuroepithelial cells 42 aquaporins 42 resonance frequency 42 NGPs 42 circuitry 42 branching morphogenesis 42 photoresists 42 photoreceptors 42 bilayer 42 hsp# 42 Schottky barrier 42 fiducials 42 crystallites 42 fluorescence quenching 42 osteogenesis 42 tribological 42 superlens 42 indium phosphide 42 ChIP seq 42 trabecular 42 lattice vibrations 42 antigen binding 42 nanocomponents 42 x ray diffraction 42 chip optical interconnects 42 MAPK signaling 42 CNTs 42 vanadium dioxide 42 unmixing 42 conductive epoxy 42 osseointegration 42 splicing 42 Sox# 42 pleating 42 biosensing 42 InN 42 fluorescence excitation 42 darkfield 42 laser annealing 42 microfabrication techniques 42 encapsulation 42 histone modification 42 #nm lithography [002] 42 excitonic 42 microvilli 42 ERK1 2 42 histone code 42 solution processable 42 Raman spectroscopic 42 microtubes 42 diffractive optics 42 graphene layers 42 lightwave 42 compressive stress 42 occludin 42 intercellular communication 42 electrophysiological 42 postsynaptic 42 electrostatic interactions 42 molecules adsorbed 42 extracellular matrix ECM 42 spintronic devices 42 integument 42 stencil printing 42 PVD CVD 42 exciton 42 polaritons 42 silicon nanowires 42 thermal gradients 42 honeycomb pattern 42 punctate 42 spintronic 42 rod photoreceptors 42 Fig. 3a 42 pore diameters 42 gene duplications 42 enzyme kinetics 42 junction amorphous silicon 42 nanofluidics 42 plexiform 42 antibody fragments 42 nucleosome 42 fungal genomes 42 liquid crystalline 42 tetramer 42 nanoelectronic 42 nanometer 42 capacitive coupling 42 silicon 42 colorimetry 42 photodetectors 42 semiconductor nanowires 42 nm CMOS 42 hydroxyapatite crystals 42 epitaxial structures 42 millisecond anneal 42 pleiotropy 42 PCR primer 42 5 hydroxymethylcytosine 42 interconversion 42 cell adhesion 42 connexin 42 magnetron sputtering 42 epidermal cells 42 textured surfaces 42 absorption spectra 42 multicellular organisms 42 dendritic 42 sub micron 42 neural crest 42 gelation 42 transparent electrode 42 numerical aperture 42 mitotic spindle 42 microelectromechanical 42 histone modifications 42 electroluminescence 42 posttranslational modification 42 metazoan 42 ultrathin layer 42 nanomechanical devices 42 crystallins 42 carbon nanotube arrays 42 vertical cavity 42 ssDNA 42 MTCMOS 42 Ion implantation 42 dielectric breakdown 42 transmission electron microscopy 42 photoresist stripping 42 conventional photolithography 42 curved surfaces 42 X inactivation 42 cortices 42 rigid substrate 42 CRISPR 42 metaphase 42 jitter measurement 42 HSF1 42 nanofluidic 42 copper interconnects 42 neuronal activity 42 photoconductive 42 cadmium selenide 42 PCB layout 42 array comparative genomic 42 leadframe 42 SiGe bipolar 42 CVD diamond 42 post perovskite 42 focused ion beam 42 glycosylation 42 hyperlens 42 ferroelectric materials 42 dielectric materials 42 graphene membranes 42 STT RAM 42 parasitic capacitance 42 heterochromatin 42 cycloaddition 42 diffraction patterns 42 inhomogeneities 42 hypocretin neurons 42 colloidal 42 zeolite membranes 42 qdots 42 Luminescent 42 phototransistors 42 topological insulator 42 CD1d 42 rRNA 42 globular proteins 42 ribonuclease 42 hydrated electron 42 selfing 42 LTPS TFT 42 nanotube sheets 42 nanofilms 42 tunable filters 42 spider silk gene 42 weak gravitational lensing 42 5 methylcytosine 42 desmosomes 42 dimensional photonic crystal 42 BGA CSP 42 genetically encoded 42 neuronal circuitry 42 aluminum gallium nitride 42 P3HT 42 polyhedral 42 nanostructured 42 underfill 42 Ball Grid Array 42 viscoelastic properties 42 #:# multiplexer 42 iridescence 42 ZnS 42 nanosized 42 Nd YAG laser 42 moldability 42 stranded RNA oligonucleotides 42 bosonic 42 Bose Einstein condensates 42 fibrillin 1 42 refractions 42 polymerization 42 magnetosomes 42 μm 42 elastic fibers 42 micro fluidics 42 nanoparticle 42 cleavable 42 kinetochore 42 analyte 42 brightfield 42 electron doped 42 photon beams 42 Hox genes 42 electrochemical 42 RNA splicing 42 cell motility 42 ovipositor 42 superior colliculus 42 HfSiON 42 #.#μm [002] 42 dielectrophoresis 42 capsulotomy 42 crystallography 42 monolayer 42 optical 42 chromatin proteins 42 Josephson junction 42 zebrafish embryos 42 Chilkoti 42 2μm 42 photochemistry 42 Rapid prototyping 42 secretory cells 42 X chromosome inactivation 42 quantum criticality 42 enhanced Raman spectroscopy 42 photosystems 42 regulating gene expression 42 ultracold molecules 42 calcium hydroxyapatite 42 nano engineered 42 photothermal 42 organic TFTs 42 incising 42 reactive ion 42 chick embryos 42 etch 42 Ubx 42 inorganic nanostructures 42 #S subunit 42 nanocrystalline materials 42 polypeptides